11/18/2010	9:04:39 AM	Helium valve closed
11/18/2010	9:04:40 AM	SiCl4 pre valve closed
11/18/2010	9:04:56 AM	Helium MFC set to  5.000000
11/18/2010	9:04:57 AM	Helium valve opened
11/18/2010	9:05:01 AM	Helium MFC set to  500.000000
11/18/2010	9:05:02 AM	SiCl4 pre valve opened
11/18/2010	9:43:59 AM	SiCl4 post valve closed
11/18/2010	9:44:00 AM	Helium valve closed
11/18/2010	9:44:00 AM	SiCl4 pre valve closed
11/18/2010	9:44:23 AM	Helium valve opened
11/18/2010	9:44:31 AM	Helium valve closed
11/18/2010	9:44:45 AM	Helium MFC set to  100.000000
11/18/2010	9:44:49 AM	Helium valve opened
11/18/2010	9:44:54 AM	SiCl4 pre valve opened
11/18/2010	9:45:03 AM	SiCl4 pre valve closed
11/18/2010	9:45:07 AM	Bypass valve closed
11/18/2010	9:45:08 AM	Main Vac valve closed
11/18/2010	9:46:08 AM	SiCl4 pre valve opened
11/18/2010	9:46:24 AM	SiCl4 pre valve closed
11/18/2010	9:46:46 AM	Helium MFC set to  500.000000
11/18/2010	9:47:30 AM	SiCl4 pre valve opened
11/18/2010	9:47:37 AM	SiCl4 pre valve closed
11/18/2010	9:47:46 AM	Helium MFC set to  100.000000
11/18/2010	9:47:47 AM	Helium valve closed
11/18/2010	9:47:52 AM	Helium MFC set to  10.000000
11/18/2010	9:47:53 AM	Helium valve opened
11/18/2010	9:48:02 AM	Helium MFC set to  100.000000
11/18/2010	9:48:03 AM	Helium valve closed
11/18/2010	9:48:06 AM	Helium valve opened
11/18/2010	9:48:09 AM	Helium valve closed
11/18/2010	9:48:12 AM	Helium valve opened
11/18/2010	9:48:17 AM	Helium valve closed
11/18/2010	9:48:22 AM	SiCl4 post valve opened
11/18/2010	9:48:25 AM	Helium valve opened
11/18/2010	9:48:27 AM	Helium valve closed
11/18/2010	9:48:28 AM	Helium valve opened
11/18/2010	9:48:30 AM	Helium valve closed
11/18/2010	9:48:33 AM	SiCl4 post valve closed
11/18/2010	9:50:11 AM	SiCl4 pre valve opened
11/18/2010	9:50:14 AM	SiCl4 pre valve closed
11/18/2010	10:02:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2010	10:02:07 AM	Recipe started at 10:02 AM
11/18/2010	10:02:07 AM	Helium valve closed
11/18/2010	10:02:07 AM	H2 valve closed
11/18/2010	10:02:07 AM	BCl3 valve closed
11/18/2010	10:02:07 AM	PH3 valve closed
11/18/2010	10:02:07 AM	SiCl4 pre valve closed
11/18/2010	10:02:07 AM	SiCl4 post valve closed
11/18/2010	10:02:07 AM	Main Vac valve closed
11/18/2010	10:02:07 AM	Bubbler valve closed
11/18/2010	10:02:07 AM	Bypass valve opened
11/18/2010	10:02:07 AM	Helium MFC set to  0.000000
11/18/2010	10:02:07 AM	H2 MFC set to  0.000000
11/18/2010	10:02:07 AM	BCl3 MFC set to  0.000000
11/18/2010	10:02:07 AM	PHl3 MFC set to  0.000000
11/18/2010	10:02:07 AM	SiCl4 MFC set to  0.000000
11/18/2010	10:02:07 AM	Bypass solenoid MFC set to  0.000000
11/18/2010	10:02:07 AM	Tube furnace set to 0
11/18/2010	10:02:44 AM	Helium valve closed
11/18/2010	10:02:44 AM	H2 valve closed
11/18/2010	10:02:44 AM	BCl3 valve closed
11/18/2010	10:02:44 AM	PH3 valve closed
11/18/2010	10:02:44 AM	SiCl4 pre valve closed
11/18/2010	10:02:44 AM	SiCl4 post valve closed
11/18/2010	10:02:44 AM	Bubbler valve closed
11/18/2010	10:02:44 AM	Main Vac valve opened
11/18/2010	10:02:44 AM	Bypass valve opened
11/18/2010	10:02:44 AM	Helium MFC set to  0.000000
11/18/2010	10:02:44 AM	H2 MFC set to  0.000000
11/18/2010	10:02:44 AM	BCl3 MFC set to  0.000000
11/18/2010	10:02:44 AM	PHl3 MFC set to  0.000000
11/18/2010	10:02:44 AM	SiCl4 MFC set to  0.000000
11/18/2010	10:02:44 AM	Bypass solenoid MFC set to  0.000000
11/18/2010	10:02:44 AM	Tube furnace set to 0
11/18/2010	10:02:44 AM	Run finished at 10:02 AM
11/18/2010	10:02:44 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2010	10:03:44 AM	Helium MFC set to  100.000000
11/18/2010	10:03:46 AM	Helium valve opened
11/18/2010	10:03:50 AM	Helium valve closed
11/18/2010	10:08:33 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2010	10:08:34 AM	Recipe started at 10:08 AM
11/18/2010	10:08:34 AM	H2 valve closed
11/18/2010	10:08:34 AM	BCl3 valve closed
11/18/2010	10:08:34 AM	PH3 valve closed
11/18/2010	10:08:34 AM	SiCl4 pre valve closed
11/18/2010	10:08:34 AM	SiCl4 post valve closed
11/18/2010	10:08:34 AM	Main Vac valve closed
11/18/2010	10:08:34 AM	Bypass valve closed
11/18/2010	10:08:34 AM	Bubbler valve closed
11/18/2010	10:08:34 AM	Helium valve opened
11/18/2010	10:08:34 AM	Helium MFC set to  500.000000
11/18/2010	10:08:34 AM	H2 MFC set to  0.000000
11/18/2010	10:08:34 AM	BCl3 MFC set to  0.000000
11/18/2010	10:08:34 AM	PHl3 MFC set to  0.000000
11/18/2010	10:08:34 AM	SiCl4 MFC set to  0.000000
11/18/2010	10:08:34 AM	Bypass solenoid MFC set to  0.000000
11/18/2010	10:08:34 AM	Tube furnace set to 0
11/18/2010	10:09:54 AM	Helium valve closed
11/18/2010	10:09:54 AM	H2 valve closed
11/18/2010	10:09:54 AM	BCl3 valve closed
11/18/2010	10:09:54 AM	PH3 valve closed
11/18/2010	10:09:54 AM	SiCl4 pre valve closed
11/18/2010	10:09:54 AM	SiCl4 post valve closed
11/18/2010	10:09:54 AM	Main Vac valve closed
11/18/2010	10:09:54 AM	Bypass valve closed
11/18/2010	10:09:54 AM	Bubbler valve closed
11/18/2010	10:09:54 AM	Helium MFC set to  0.000000
11/18/2010	10:09:54 AM	H2 MFC set to  0.000000
11/18/2010	10:09:54 AM	BCl3 MFC set to  0.000000
11/18/2010	10:09:54 AM	PHl3 MFC set to  0.000000
11/18/2010	10:09:54 AM	SiCl4 MFC set to  0.000000
11/18/2010	10:09:54 AM	Bypass solenoid MFC set to  0.000000
11/18/2010	10:09:55 AM	Tube furnace set to 0
11/18/2010	10:09:55 AM	Run finished at 10:09 AM
11/18/2010	10:09:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2010	1:29:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2010	1:29:25 PM	Recipe started at 1:29 PM
11/18/2010	1:29:25 PM	Helium valve closed
11/18/2010	1:29:25 PM	H2 valve closed
11/18/2010	1:29:25 PM	BCl3 valve closed
11/18/2010	1:29:25 PM	PH3 valve closed
11/18/2010	1:29:25 PM	SiCl4 pre valve closed
11/18/2010	1:29:25 PM	SiCl4 post valve closed
11/18/2010	1:29:25 PM	Main Vac valve closed
11/18/2010	1:29:25 PM	Bubbler valve closed
11/18/2010	1:29:25 PM	Bypass valve opened
11/18/2010	1:29:25 PM	Helium MFC set to  0.000000
11/18/2010	1:29:25 PM	H2 MFC set to  0.000000
11/18/2010	1:29:25 PM	BCl3 MFC set to  0.000000
11/18/2010	1:29:25 PM	PHl3 MFC set to  0.000000
11/18/2010	1:29:25 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:29:25 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:29:25 PM	Tube furnace set to 0
11/18/2010	1:30:30 PM	Helium valve closed
11/18/2010	1:30:30 PM	H2 valve closed
11/18/2010	1:30:30 PM	BCl3 valve closed
11/18/2010	1:30:30 PM	PH3 valve closed
11/18/2010	1:30:30 PM	SiCl4 pre valve closed
11/18/2010	1:30:30 PM	SiCl4 post valve closed
11/18/2010	1:30:30 PM	Bubbler valve closed
11/18/2010	1:30:30 PM	Main Vac valve opened
11/18/2010	1:30:30 PM	Bypass valve opened
11/18/2010	1:30:30 PM	Helium MFC set to  0.000000
11/18/2010	1:30:30 PM	H2 MFC set to  0.000000
11/18/2010	1:30:30 PM	BCl3 MFC set to  0.000000
11/18/2010	1:30:30 PM	PHl3 MFC set to  0.000000
11/18/2010	1:30:30 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:30:30 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:30:30 PM	Tube furnace set to 0
11/18/2010	1:30:31 PM	Run finished at 1:30 PM
11/18/2010	1:30:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2010	1:31:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/18/2010	1:31:48 PM	Recipe started at 1:31 PM
11/18/2010	1:31:48 PM	Helium valve closed
11/18/2010	1:31:48 PM	H2 valve closed
11/18/2010	1:31:48 PM	BCl3 valve closed
11/18/2010	1:31:48 PM	PH3 valve closed
11/18/2010	1:31:48 PM	SiCl4 pre valve closed
11/18/2010	1:31:48 PM	SiCl4 post valve closed
11/18/2010	1:31:48 PM	Main Vac valve closed
11/18/2010	1:31:48 PM	Bubbler valve closed
11/18/2010	1:31:48 PM	Bypass valve opened
11/18/2010	1:31:48 PM	Helium MFC set to  0.000000
11/18/2010	1:31:48 PM	H2 MFC set to  0.000000
11/18/2010	1:31:48 PM	BCl3 MFC set to  0.000000
11/18/2010	1:31:48 PM	PHl3 MFC set to  0.000000
11/18/2010	1:31:48 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:31:48 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:31:48 PM	Tube furnace set to 0
11/18/2010	1:31:49 PM	Helium valve closed
11/18/2010	1:31:49 PM	H2 valve closed
11/18/2010	1:31:49 PM	BCl3 valve closed
11/18/2010	1:31:49 PM	PH3 valve closed
11/18/2010	1:31:49 PM	SiCl4 pre valve closed
11/18/2010	1:31:49 PM	SiCl4 post valve closed
11/18/2010	1:31:49 PM	Bubbler valve closed
11/18/2010	1:31:49 PM	Main Vac valve opened
11/18/2010	1:31:49 PM	Bypass valve opened
11/18/2010	1:31:49 PM	Helium MFC set to  0.000000
11/18/2010	1:31:49 PM	H2 MFC set to  0.000000
11/18/2010	1:31:49 PM	BCl3 MFC set to  0.000000
11/18/2010	1:31:49 PM	PHl3 MFC set to  0.000000
11/18/2010	1:31:49 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:31:49 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:31:49 PM	Tube furnace set to 0
11/18/2010	1:32:49 PM	H2 valve closed
11/18/2010	1:32:49 PM	BCl3 valve closed
11/18/2010	1:32:49 PM	PH3 valve closed
11/18/2010	1:32:49 PM	SiCl4 pre valve closed
11/18/2010	1:32:49 PM	SiCl4 post valve closed
11/18/2010	1:32:49 PM	Bubbler valve closed
11/18/2010	1:32:49 PM	Helium valve opened
11/18/2010	1:32:49 PM	Main Vac valve opened
11/18/2010	1:32:49 PM	Bypass valve opened
11/18/2010	1:32:49 PM	Helium MFC set to  100.000000
11/18/2010	1:32:49 PM	H2 MFC set to  0.000000
11/18/2010	1:32:49 PM	BCl3 MFC set to  0.000000
11/18/2010	1:32:49 PM	PHl3 MFC set to  0.000000
11/18/2010	1:32:49 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:32:49 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:32:49 PM	Tube furnace set to 0
11/18/2010	1:33:49 PM	Helium valve closed
11/18/2010	1:33:49 PM	H2 valve closed
11/18/2010	1:33:49 PM	BCl3 valve closed
11/18/2010	1:33:49 PM	PH3 valve closed
11/18/2010	1:33:49 PM	SiCl4 pre valve closed
11/18/2010	1:33:49 PM	SiCl4 post valve closed
11/18/2010	1:33:49 PM	Bubbler valve closed
11/18/2010	1:33:49 PM	Main Vac valve opened
11/18/2010	1:33:49 PM	Bypass valve opened
11/18/2010	1:33:49 PM	Helium MFC set to  0.000000
11/18/2010	1:33:49 PM	H2 MFC set to  0.000000
11/18/2010	1:33:49 PM	BCl3 MFC set to  0.000000
11/18/2010	1:33:49 PM	PHl3 MFC set to  0.000000
11/18/2010	1:33:49 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:33:49 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:33:49 PM	Tube furnace set to 0
11/18/2010	1:34:49 PM	H2 valve closed
11/18/2010	1:34:49 PM	BCl3 valve closed
11/18/2010	1:34:49 PM	PH3 valve closed
11/18/2010	1:34:49 PM	SiCl4 pre valve closed
11/18/2010	1:34:49 PM	SiCl4 post valve closed
11/18/2010	1:34:49 PM	Bubbler valve closed
11/18/2010	1:34:49 PM	Helium valve opened
11/18/2010	1:34:49 PM	Main Vac valve opened
11/18/2010	1:34:49 PM	Bypass valve opened
11/18/2010	1:34:49 PM	Helium MFC set to  100.000000
11/18/2010	1:34:49 PM	H2 MFC set to  0.000000
11/18/2010	1:34:49 PM	BCl3 MFC set to  0.000000
11/18/2010	1:34:49 PM	PHl3 MFC set to  0.000000
11/18/2010	1:34:49 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:34:49 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:34:49 PM	Tube furnace set to 0
11/18/2010	1:35:49 PM	Helium valve closed
11/18/2010	1:35:49 PM	H2 valve closed
11/18/2010	1:35:49 PM	BCl3 valve closed
11/18/2010	1:35:49 PM	PH3 valve closed
11/18/2010	1:35:49 PM	SiCl4 pre valve closed
11/18/2010	1:35:49 PM	SiCl4 post valve closed
11/18/2010	1:35:49 PM	Bubbler valve closed
11/18/2010	1:35:49 PM	Main Vac valve opened
11/18/2010	1:35:49 PM	Bypass valve opened
11/18/2010	1:35:49 PM	Helium MFC set to  0.000000
11/18/2010	1:35:49 PM	H2 MFC set to  0.000000
11/18/2010	1:35:49 PM	BCl3 MFC set to  0.000000
11/18/2010	1:35:49 PM	PHl3 MFC set to  0.000000
11/18/2010	1:35:49 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:35:49 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:35:50 PM	Tube furnace set to 0
11/18/2010	1:36:50 PM	H2 valve closed
11/18/2010	1:36:50 PM	BCl3 valve closed
11/18/2010	1:36:50 PM	PH3 valve closed
11/18/2010	1:36:50 PM	SiCl4 pre valve closed
11/18/2010	1:36:50 PM	SiCl4 post valve closed
11/18/2010	1:36:50 PM	Bubbler valve closed
11/18/2010	1:36:50 PM	Helium valve opened
11/18/2010	1:36:50 PM	Main Vac valve opened
11/18/2010	1:36:50 PM	Bypass valve opened
11/18/2010	1:36:50 PM	Helium MFC set to  100.000000
11/18/2010	1:36:50 PM	H2 MFC set to  0.000000
11/18/2010	1:36:50 PM	BCl3 MFC set to  0.000000
11/18/2010	1:36:50 PM	PHl3 MFC set to  0.000000
11/18/2010	1:36:50 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:36:50 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:36:50 PM	Tube furnace set to 0
11/18/2010	1:37:50 PM	Helium valve closed
11/18/2010	1:37:50 PM	H2 valve closed
11/18/2010	1:37:50 PM	BCl3 valve closed
11/18/2010	1:37:50 PM	PH3 valve closed
11/18/2010	1:37:50 PM	SiCl4 pre valve closed
11/18/2010	1:37:50 PM	SiCl4 post valve closed
11/18/2010	1:37:50 PM	Bubbler valve closed
11/18/2010	1:37:50 PM	Main Vac valve opened
11/18/2010	1:37:50 PM	Bypass valve opened
11/18/2010	1:37:50 PM	Helium MFC set to  0.000000
11/18/2010	1:37:50 PM	H2 MFC set to  0.000000
11/18/2010	1:37:50 PM	BCl3 MFC set to  0.000000
11/18/2010	1:37:50 PM	PHl3 MFC set to  0.000000
11/18/2010	1:37:50 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:37:50 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:37:50 PM	Tube furnace set to 0
11/18/2010	1:38:50 PM	H2 valve closed
11/18/2010	1:38:50 PM	BCl3 valve closed
11/18/2010	1:38:50 PM	PH3 valve closed
11/18/2010	1:38:50 PM	SiCl4 pre valve closed
11/18/2010	1:38:50 PM	SiCl4 post valve closed
11/18/2010	1:38:50 PM	Bubbler valve closed
11/18/2010	1:38:50 PM	Helium valve opened
11/18/2010	1:38:50 PM	Main Vac valve opened
11/18/2010	1:38:50 PM	Bypass valve opened
11/18/2010	1:38:50 PM	Helium MFC set to  100.000000
11/18/2010	1:38:50 PM	H2 MFC set to  0.000000
11/18/2010	1:38:50 PM	BCl3 MFC set to  0.000000
11/18/2010	1:38:50 PM	PHl3 MFC set to  0.000000
11/18/2010	1:38:50 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:38:50 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:38:50 PM	Tube furnace set to 0
11/18/2010	1:39:50 PM	Helium valve closed
11/18/2010	1:39:50 PM	H2 valve closed
11/18/2010	1:39:50 PM	BCl3 valve closed
11/18/2010	1:39:50 PM	PH3 valve closed
11/18/2010	1:39:50 PM	SiCl4 pre valve closed
11/18/2010	1:39:50 PM	SiCl4 post valve closed
11/18/2010	1:39:50 PM	Bubbler valve closed
11/18/2010	1:39:50 PM	Main Vac valve opened
11/18/2010	1:39:50 PM	Bypass valve opened
11/18/2010	1:39:50 PM	Helium MFC set to  0.000000
11/18/2010	1:39:50 PM	H2 MFC set to  0.000000
11/18/2010	1:39:50 PM	BCl3 MFC set to  0.000000
11/18/2010	1:39:50 PM	PHl3 MFC set to  0.000000
11/18/2010	1:39:50 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:39:50 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:39:50 PM	Tube furnace set to 0
11/18/2010	1:40:50 PM	H2 valve closed
11/18/2010	1:40:50 PM	BCl3 valve closed
11/18/2010	1:40:50 PM	PH3 valve closed
11/18/2010	1:40:50 PM	SiCl4 pre valve closed
11/18/2010	1:40:50 PM	SiCl4 post valve closed
11/18/2010	1:40:50 PM	Bubbler valve closed
11/18/2010	1:40:50 PM	Helium valve opened
11/18/2010	1:40:50 PM	Main Vac valve opened
11/18/2010	1:40:50 PM	Bypass valve opened
11/18/2010	1:40:50 PM	Helium MFC set to  100.000000
11/18/2010	1:40:50 PM	H2 MFC set to  0.000000
11/18/2010	1:40:50 PM	BCl3 MFC set to  0.000000
11/18/2010	1:40:50 PM	PHl3 MFC set to  0.000000
11/18/2010	1:40:50 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:40:50 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:40:50 PM	Tube furnace set to 0
11/18/2010	1:41:51 PM	Helium valve closed
11/18/2010	1:41:51 PM	H2 valve closed
11/18/2010	1:41:51 PM	BCl3 valve closed
11/18/2010	1:41:51 PM	PH3 valve closed
11/18/2010	1:41:51 PM	SiCl4 pre valve closed
11/18/2010	1:41:51 PM	SiCl4 post valve closed
11/18/2010	1:41:51 PM	Bubbler valve closed
11/18/2010	1:41:51 PM	Main Vac valve opened
11/18/2010	1:41:51 PM	Bypass valve opened
11/18/2010	1:41:51 PM	Helium MFC set to  0.000000
11/18/2010	1:41:51 PM	H2 MFC set to  0.000000
11/18/2010	1:41:51 PM	BCl3 MFC set to  0.000000
11/18/2010	1:41:51 PM	PHl3 MFC set to  0.000000
11/18/2010	1:41:51 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:41:51 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:41:51 PM	Tube furnace set to 0
11/18/2010	1:42:51 PM	H2 valve closed
11/18/2010	1:42:51 PM	BCl3 valve closed
11/18/2010	1:42:51 PM	PH3 valve closed
11/18/2010	1:42:51 PM	SiCl4 pre valve closed
11/18/2010	1:42:51 PM	SiCl4 post valve closed
11/18/2010	1:42:51 PM	Bubbler valve closed
11/18/2010	1:42:51 PM	Helium valve opened
11/18/2010	1:42:51 PM	Main Vac valve opened
11/18/2010	1:42:51 PM	Bypass valve opened
11/18/2010	1:42:51 PM	Helium MFC set to  100.000000
11/18/2010	1:42:51 PM	H2 MFC set to  0.000000
11/18/2010	1:42:51 PM	BCl3 MFC set to  0.000000
11/18/2010	1:42:51 PM	PHl3 MFC set to  0.000000
11/18/2010	1:42:51 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:42:51 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:42:51 PM	Tube furnace set to 0
11/18/2010	1:43:51 PM	Helium valve closed
11/18/2010	1:43:51 PM	H2 valve closed
11/18/2010	1:43:51 PM	BCl3 valve closed
11/18/2010	1:43:51 PM	PH3 valve closed
11/18/2010	1:43:51 PM	SiCl4 pre valve closed
11/18/2010	1:43:51 PM	SiCl4 post valve closed
11/18/2010	1:43:51 PM	Bubbler valve closed
11/18/2010	1:43:51 PM	Main Vac valve opened
11/18/2010	1:43:51 PM	Bypass valve opened
11/18/2010	1:43:51 PM	Helium MFC set to  0.000000
11/18/2010	1:43:51 PM	H2 MFC set to  0.000000
11/18/2010	1:43:51 PM	BCl3 MFC set to  0.000000
11/18/2010	1:43:51 PM	PHl3 MFC set to  0.000000
11/18/2010	1:43:51 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:43:51 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:43:51 PM	Tube furnace set to 0
11/18/2010	1:44:51 PM	H2 valve closed
11/18/2010	1:44:51 PM	BCl3 valve closed
11/18/2010	1:44:51 PM	PH3 valve closed
11/18/2010	1:44:51 PM	SiCl4 pre valve closed
11/18/2010	1:44:51 PM	SiCl4 post valve closed
11/18/2010	1:44:51 PM	Bubbler valve closed
11/18/2010	1:44:51 PM	Helium valve opened
11/18/2010	1:44:51 PM	Main Vac valve opened
11/18/2010	1:44:51 PM	Bypass valve opened
11/18/2010	1:44:51 PM	Helium MFC set to  100.000000
11/18/2010	1:44:51 PM	H2 MFC set to  0.000000
11/18/2010	1:44:51 PM	BCl3 MFC set to  0.000000
11/18/2010	1:44:51 PM	PHl3 MFC set to  0.000000
11/18/2010	1:44:51 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:44:51 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:44:51 PM	Tube furnace set to 0
11/18/2010	1:45:51 PM	Helium valve closed
11/18/2010	1:45:51 PM	H2 valve closed
11/18/2010	1:45:51 PM	BCl3 valve closed
11/18/2010	1:45:51 PM	PH3 valve closed
11/18/2010	1:45:51 PM	SiCl4 pre valve closed
11/18/2010	1:45:51 PM	SiCl4 post valve closed
11/18/2010	1:45:51 PM	Bubbler valve closed
11/18/2010	1:45:51 PM	Main Vac valve opened
11/18/2010	1:45:51 PM	Bypass valve opened
11/18/2010	1:45:51 PM	Helium MFC set to  0.000000
11/18/2010	1:45:51 PM	H2 MFC set to  0.000000
11/18/2010	1:45:51 PM	BCl3 MFC set to  0.000000
11/18/2010	1:45:51 PM	PHl3 MFC set to  0.000000
11/18/2010	1:45:51 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:45:51 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:45:51 PM	Tube furnace set to 0
11/18/2010	1:46:52 PM	H2 valve closed
11/18/2010	1:46:52 PM	BCl3 valve closed
11/18/2010	1:46:52 PM	PH3 valve closed
11/18/2010	1:46:52 PM	SiCl4 pre valve closed
11/18/2010	1:46:52 PM	SiCl4 post valve closed
11/18/2010	1:46:52 PM	Bubbler valve closed
11/18/2010	1:46:52 PM	Helium valve opened
11/18/2010	1:46:52 PM	Main Vac valve opened
11/18/2010	1:46:52 PM	Bypass valve opened
11/18/2010	1:46:52 PM	Helium MFC set to  100.000000
11/18/2010	1:46:52 PM	H2 MFC set to  0.000000
11/18/2010	1:46:52 PM	BCl3 MFC set to  0.000000
11/18/2010	1:46:52 PM	PHl3 MFC set to  0.000000
11/18/2010	1:46:52 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:46:52 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:46:52 PM	Tube furnace set to 0
11/18/2010	1:47:52 PM	Helium valve closed
11/18/2010	1:47:52 PM	H2 valve closed
11/18/2010	1:47:52 PM	BCl3 valve closed
11/18/2010	1:47:52 PM	PH3 valve closed
11/18/2010	1:47:52 PM	SiCl4 pre valve closed
11/18/2010	1:47:52 PM	SiCl4 post valve closed
11/18/2010	1:47:52 PM	Bubbler valve closed
11/18/2010	1:47:52 PM	Main Vac valve opened
11/18/2010	1:47:52 PM	Bypass valve opened
11/18/2010	1:47:52 PM	Helium MFC set to  0.000000
11/18/2010	1:47:52 PM	H2 MFC set to  0.000000
11/18/2010	1:47:52 PM	BCl3 MFC set to  0.000000
11/18/2010	1:47:52 PM	PHl3 MFC set to  0.000000
11/18/2010	1:47:52 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:47:52 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:47:52 PM	Tube furnace set to 0
11/18/2010	1:48:52 PM	H2 valve closed
11/18/2010	1:48:52 PM	BCl3 valve closed
11/18/2010	1:48:52 PM	PH3 valve closed
11/18/2010	1:48:52 PM	SiCl4 pre valve closed
11/18/2010	1:48:52 PM	SiCl4 post valve closed
11/18/2010	1:48:52 PM	Bubbler valve closed
11/18/2010	1:48:52 PM	Helium valve opened
11/18/2010	1:48:52 PM	Main Vac valve opened
11/18/2010	1:48:52 PM	Bypass valve opened
11/18/2010	1:48:52 PM	Helium MFC set to  100.000000
11/18/2010	1:48:52 PM	H2 MFC set to  0.000000
11/18/2010	1:48:52 PM	BCl3 MFC set to  0.000000
11/18/2010	1:48:52 PM	PHl3 MFC set to  0.000000
11/18/2010	1:48:52 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:48:52 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:48:52 PM	Tube furnace set to 0
11/18/2010	1:49:52 PM	Helium valve closed
11/18/2010	1:49:52 PM	H2 valve closed
11/18/2010	1:49:52 PM	BCl3 valve closed
11/18/2010	1:49:52 PM	PH3 valve closed
11/18/2010	1:49:52 PM	SiCl4 pre valve closed
11/18/2010	1:49:52 PM	SiCl4 post valve closed
11/18/2010	1:49:52 PM	Bubbler valve closed
11/18/2010	1:49:52 PM	Main Vac valve opened
11/18/2010	1:49:52 PM	Bypass valve opened
11/18/2010	1:49:52 PM	Helium MFC set to  0.000000
11/18/2010	1:49:52 PM	H2 MFC set to  0.000000
11/18/2010	1:49:52 PM	BCl3 MFC set to  0.000000
11/18/2010	1:49:52 PM	PHl3 MFC set to  0.000000
11/18/2010	1:49:52 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:49:52 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:49:52 PM	Tube furnace set to 0
11/18/2010	1:50:52 PM	H2 valve closed
11/18/2010	1:50:52 PM	BCl3 valve closed
11/18/2010	1:50:52 PM	PH3 valve closed
11/18/2010	1:50:52 PM	SiCl4 pre valve closed
11/18/2010	1:50:52 PM	SiCl4 post valve closed
11/18/2010	1:50:52 PM	Bubbler valve closed
11/18/2010	1:50:52 PM	Helium valve opened
11/18/2010	1:50:52 PM	Main Vac valve opened
11/18/2010	1:50:52 PM	Bypass valve opened
11/18/2010	1:50:52 PM	Helium MFC set to  100.000000
11/18/2010	1:50:52 PM	H2 MFC set to  0.000000
11/18/2010	1:50:52 PM	BCl3 MFC set to  0.000000
11/18/2010	1:50:52 PM	PHl3 MFC set to  0.000000
11/18/2010	1:50:52 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:50:52 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:50:52 PM	Tube furnace set to 0
11/18/2010	1:51:52 PM	Helium valve closed
11/18/2010	1:51:52 PM	H2 valve closed
11/18/2010	1:51:52 PM	BCl3 valve closed
11/18/2010	1:51:52 PM	PH3 valve closed
11/18/2010	1:51:52 PM	SiCl4 pre valve closed
11/18/2010	1:51:52 PM	SiCl4 post valve closed
11/18/2010	1:51:52 PM	Bubbler valve closed
11/18/2010	1:51:52 PM	Main Vac valve opened
11/18/2010	1:51:52 PM	Bypass valve opened
11/18/2010	1:51:52 PM	Helium MFC set to  0.000000
11/18/2010	1:51:53 PM	H2 MFC set to  0.000000
11/18/2010	1:51:53 PM	BCl3 MFC set to  0.000000
11/18/2010	1:51:53 PM	PHl3 MFC set to  0.000000
11/18/2010	1:51:53 PM	SiCl4 MFC set to  0.000000
11/18/2010	1:51:53 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	1:51:53 PM	Tube furnace set to 0
11/18/2010	1:51:54 PM	Run finished at 1:51 PM
11/18/2010	1:51:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/18/2010	2:05:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/18/2010	2:05:29 PM	Recipe started at 2:05 PM
11/18/2010	2:05:29 PM	Helium valve closed
11/18/2010	2:05:29 PM	H2 valve closed
11/18/2010	2:05:29 PM	BCl3 valve closed
11/18/2010	2:05:29 PM	PH3 valve closed
11/18/2010	2:05:29 PM	SiCl4 pre valve closed
11/18/2010	2:05:29 PM	SiCl4 post valve closed
11/18/2010	2:05:29 PM	Main Vac valve closed
11/18/2010	2:05:29 PM	Bubbler valve closed
11/18/2010	2:05:29 PM	Bypass valve opened
11/18/2010	2:05:29 PM	Helium MFC set to  0.000000
11/18/2010	2:05:29 PM	H2 MFC set to  0.000000
11/18/2010	2:05:29 PM	BCl3 MFC set to  0.000000
11/18/2010	2:05:29 PM	PHl3 MFC set to  0.000000
11/18/2010	2:05:29 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:05:29 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:05:29 PM	Tube furnace set to 0
11/18/2010	2:05:29 PM	Helium valve closed
11/18/2010	2:05:29 PM	H2 valve closed
11/18/2010	2:05:29 PM	BCl3 valve closed
11/18/2010	2:05:29 PM	PH3 valve closed
11/18/2010	2:05:29 PM	SiCl4 pre valve closed
11/18/2010	2:05:29 PM	SiCl4 post valve closed
11/18/2010	2:05:29 PM	Bubbler valve closed
11/18/2010	2:05:29 PM	Main Vac valve opened
11/18/2010	2:05:29 PM	Bypass valve opened
11/18/2010	2:05:29 PM	Helium MFC set to  0.000000
11/18/2010	2:05:29 PM	H2 MFC set to  0.000000
11/18/2010	2:05:29 PM	BCl3 MFC set to  0.000000
11/18/2010	2:05:29 PM	PHl3 MFC set to  0.000000
11/18/2010	2:05:29 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:05:29 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:05:30 PM	Tube furnace set to 0
11/18/2010	2:06:30 PM	H2 valve closed
11/18/2010	2:06:30 PM	BCl3 valve closed
11/18/2010	2:06:30 PM	PH3 valve closed
11/18/2010	2:06:30 PM	SiCl4 pre valve closed
11/18/2010	2:06:30 PM	SiCl4 post valve closed
11/18/2010	2:06:30 PM	Bubbler valve closed
11/18/2010	2:06:30 PM	Helium valve opened
11/18/2010	2:06:30 PM	Main Vac valve opened
11/18/2010	2:06:30 PM	Bypass valve opened
11/18/2010	2:06:30 PM	Helium MFC set to  100.000000
11/18/2010	2:06:30 PM	H2 MFC set to  0.000000
11/18/2010	2:06:30 PM	BCl3 MFC set to  0.000000
11/18/2010	2:06:30 PM	PHl3 MFC set to  0.000000
11/18/2010	2:06:30 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:06:30 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:06:30 PM	Tube furnace set to 0
11/18/2010	2:07:30 PM	Helium valve closed
11/18/2010	2:07:30 PM	H2 valve closed
11/18/2010	2:07:30 PM	BCl3 valve closed
11/18/2010	2:07:30 PM	PH3 valve closed
11/18/2010	2:07:30 PM	SiCl4 pre valve closed
11/18/2010	2:07:30 PM	SiCl4 post valve closed
11/18/2010	2:07:30 PM	Bubbler valve closed
11/18/2010	2:07:30 PM	Main Vac valve opened
11/18/2010	2:07:30 PM	Bypass valve opened
11/18/2010	2:07:30 PM	Helium MFC set to  0.000000
11/18/2010	2:07:30 PM	H2 MFC set to  0.000000
11/18/2010	2:07:30 PM	BCl3 MFC set to  0.000000
11/18/2010	2:07:30 PM	PHl3 MFC set to  0.000000
11/18/2010	2:07:30 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:07:30 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:07:30 PM	Tube furnace set to 0
11/18/2010	2:08:30 PM	H2 valve closed
11/18/2010	2:08:30 PM	BCl3 valve closed
11/18/2010	2:08:30 PM	PH3 valve closed
11/18/2010	2:08:30 PM	SiCl4 pre valve closed
11/18/2010	2:08:30 PM	SiCl4 post valve closed
11/18/2010	2:08:30 PM	Bubbler valve closed
11/18/2010	2:08:30 PM	Helium valve opened
11/18/2010	2:08:30 PM	Main Vac valve opened
11/18/2010	2:08:30 PM	Bypass valve opened
11/18/2010	2:08:30 PM	Helium MFC set to  100.000000
11/18/2010	2:08:30 PM	H2 MFC set to  0.000000
11/18/2010	2:08:30 PM	BCl3 MFC set to  0.000000
11/18/2010	2:08:30 PM	PHl3 MFC set to  0.000000
11/18/2010	2:08:30 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:08:30 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:08:30 PM	Tube furnace set to 0
11/18/2010	2:09:30 PM	Helium valve closed
11/18/2010	2:09:30 PM	H2 valve closed
11/18/2010	2:09:30 PM	BCl3 valve closed
11/18/2010	2:09:30 PM	PH3 valve closed
11/18/2010	2:09:30 PM	SiCl4 pre valve closed
11/18/2010	2:09:30 PM	SiCl4 post valve closed
11/18/2010	2:09:30 PM	Bubbler valve closed
11/18/2010	2:09:30 PM	Main Vac valve opened
11/18/2010	2:09:30 PM	Bypass valve opened
11/18/2010	2:09:30 PM	Helium MFC set to  0.000000
11/18/2010	2:09:30 PM	H2 MFC set to  0.000000
11/18/2010	2:09:30 PM	BCl3 MFC set to  0.000000
11/18/2010	2:09:30 PM	PHl3 MFC set to  0.000000
11/18/2010	2:09:30 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:09:30 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:09:30 PM	Tube furnace set to 0
11/18/2010	2:10:30 PM	H2 valve closed
11/18/2010	2:10:30 PM	BCl3 valve closed
11/18/2010	2:10:30 PM	PH3 valve closed
11/18/2010	2:10:30 PM	SiCl4 pre valve closed
11/18/2010	2:10:30 PM	SiCl4 post valve closed
11/18/2010	2:10:30 PM	Bubbler valve closed
11/18/2010	2:10:30 PM	Helium valve opened
11/18/2010	2:10:30 PM	Main Vac valve opened
11/18/2010	2:10:30 PM	Bypass valve opened
11/18/2010	2:10:30 PM	Helium MFC set to  100.000000
11/18/2010	2:10:30 PM	H2 MFC set to  0.000000
11/18/2010	2:10:30 PM	BCl3 MFC set to  0.000000
11/18/2010	2:10:30 PM	PHl3 MFC set to  0.000000
11/18/2010	2:10:30 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:10:30 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:10:31 PM	Tube furnace set to 0
11/18/2010	2:11:31 PM	Helium valve closed
11/18/2010	2:11:31 PM	H2 valve closed
11/18/2010	2:11:31 PM	BCl3 valve closed
11/18/2010	2:11:31 PM	PH3 valve closed
11/18/2010	2:11:31 PM	SiCl4 pre valve closed
11/18/2010	2:11:31 PM	SiCl4 post valve closed
11/18/2010	2:11:31 PM	Bubbler valve closed
11/18/2010	2:11:31 PM	Main Vac valve opened
11/18/2010	2:11:31 PM	Bypass valve opened
11/18/2010	2:11:31 PM	Helium MFC set to  0.000000
11/18/2010	2:11:31 PM	H2 MFC set to  0.000000
11/18/2010	2:11:31 PM	BCl3 MFC set to  0.000000
11/18/2010	2:11:31 PM	PHl3 MFC set to  0.000000
11/18/2010	2:11:31 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:11:31 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:11:31 PM	Tube furnace set to 0
11/18/2010	2:12:31 PM	H2 valve closed
11/18/2010	2:12:31 PM	BCl3 valve closed
11/18/2010	2:12:31 PM	PH3 valve closed
11/18/2010	2:12:31 PM	SiCl4 pre valve closed
11/18/2010	2:12:31 PM	SiCl4 post valve closed
11/18/2010	2:12:31 PM	Bubbler valve closed
11/18/2010	2:12:31 PM	Helium valve opened
11/18/2010	2:12:31 PM	Main Vac valve opened
11/18/2010	2:12:31 PM	Bypass valve opened
11/18/2010	2:12:31 PM	Helium MFC set to  100.000000
11/18/2010	2:12:31 PM	H2 MFC set to  0.000000
11/18/2010	2:12:31 PM	BCl3 MFC set to  0.000000
11/18/2010	2:12:31 PM	PHl3 MFC set to  0.000000
11/18/2010	2:12:31 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:12:31 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:12:31 PM	Tube furnace set to 0
11/18/2010	2:13:31 PM	Helium valve closed
11/18/2010	2:13:31 PM	H2 valve closed
11/18/2010	2:13:31 PM	BCl3 valve closed
11/18/2010	2:13:31 PM	PH3 valve closed
11/18/2010	2:13:31 PM	SiCl4 pre valve closed
11/18/2010	2:13:31 PM	SiCl4 post valve closed
11/18/2010	2:13:31 PM	Bubbler valve closed
11/18/2010	2:13:31 PM	Main Vac valve opened
11/18/2010	2:13:31 PM	Bypass valve opened
11/18/2010	2:13:31 PM	Helium MFC set to  0.000000
11/18/2010	2:13:31 PM	H2 MFC set to  0.000000
11/18/2010	2:13:31 PM	BCl3 MFC set to  0.000000
11/18/2010	2:13:31 PM	PHl3 MFC set to  0.000000
11/18/2010	2:13:31 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:13:31 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:13:31 PM	Tube furnace set to 0
11/18/2010	2:14:31 PM	H2 valve closed
11/18/2010	2:14:31 PM	BCl3 valve closed
11/18/2010	2:14:31 PM	PH3 valve closed
11/18/2010	2:14:31 PM	SiCl4 pre valve closed
11/18/2010	2:14:31 PM	SiCl4 post valve closed
11/18/2010	2:14:31 PM	Bubbler valve closed
11/18/2010	2:14:31 PM	Helium valve opened
11/18/2010	2:14:31 PM	Main Vac valve opened
11/18/2010	2:14:31 PM	Bypass valve opened
11/18/2010	2:14:31 PM	Helium MFC set to  100.000000
11/18/2010	2:14:31 PM	H2 MFC set to  0.000000
11/18/2010	2:14:31 PM	BCl3 MFC set to  0.000000
11/18/2010	2:14:31 PM	PHl3 MFC set to  0.000000
11/18/2010	2:14:31 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:14:31 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:14:31 PM	Tube furnace set to 0
11/18/2010	2:15:31 PM	Helium valve closed
11/18/2010	2:15:31 PM	H2 valve closed
11/18/2010	2:15:31 PM	BCl3 valve closed
11/18/2010	2:15:31 PM	PH3 valve closed
11/18/2010	2:15:31 PM	SiCl4 pre valve closed
11/18/2010	2:15:31 PM	SiCl4 post valve closed
11/18/2010	2:15:31 PM	Bubbler valve closed
11/18/2010	2:15:31 PM	Main Vac valve opened
11/18/2010	2:15:31 PM	Bypass valve opened
11/18/2010	2:15:31 PM	Helium MFC set to  0.000000
11/18/2010	2:15:31 PM	H2 MFC set to  0.000000
11/18/2010	2:15:31 PM	BCl3 MFC set to  0.000000
11/18/2010	2:15:31 PM	PHl3 MFC set to  0.000000
11/18/2010	2:15:31 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:15:31 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:15:32 PM	Tube furnace set to 0
11/18/2010	2:16:32 PM	H2 valve closed
11/18/2010	2:16:32 PM	BCl3 valve closed
11/18/2010	2:16:32 PM	PH3 valve closed
11/18/2010	2:16:32 PM	SiCl4 pre valve closed
11/18/2010	2:16:32 PM	SiCl4 post valve closed
11/18/2010	2:16:32 PM	Bubbler valve closed
11/18/2010	2:16:32 PM	Helium valve opened
11/18/2010	2:16:32 PM	Main Vac valve opened
11/18/2010	2:16:32 PM	Bypass valve opened
11/18/2010	2:16:32 PM	Helium MFC set to  100.000000
11/18/2010	2:16:32 PM	H2 MFC set to  0.000000
11/18/2010	2:16:32 PM	BCl3 MFC set to  0.000000
11/18/2010	2:16:32 PM	PHl3 MFC set to  0.000000
11/18/2010	2:16:32 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:16:32 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:16:32 PM	Tube furnace set to 0
11/18/2010	2:17:32 PM	Helium valve closed
11/18/2010	2:17:32 PM	H2 valve closed
11/18/2010	2:17:32 PM	BCl3 valve closed
11/18/2010	2:17:32 PM	PH3 valve closed
11/18/2010	2:17:32 PM	SiCl4 pre valve closed
11/18/2010	2:17:32 PM	SiCl4 post valve closed
11/18/2010	2:17:32 PM	Bubbler valve closed
11/18/2010	2:17:32 PM	Main Vac valve opened
11/18/2010	2:17:32 PM	Bypass valve opened
11/18/2010	2:17:32 PM	Helium MFC set to  0.000000
11/18/2010	2:17:32 PM	H2 MFC set to  0.000000
11/18/2010	2:17:32 PM	BCl3 MFC set to  0.000000
11/18/2010	2:17:32 PM	PHl3 MFC set to  0.000000
11/18/2010	2:17:32 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:17:32 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:17:32 PM	Tube furnace set to 0
11/18/2010	2:18:32 PM	H2 valve closed
11/18/2010	2:18:32 PM	BCl3 valve closed
11/18/2010	2:18:32 PM	PH3 valve closed
11/18/2010	2:18:32 PM	SiCl4 pre valve closed
11/18/2010	2:18:32 PM	SiCl4 post valve closed
11/18/2010	2:18:32 PM	Bubbler valve closed
11/18/2010	2:18:32 PM	Helium valve opened
11/18/2010	2:18:32 PM	Main Vac valve opened
11/18/2010	2:18:32 PM	Bypass valve opened
11/18/2010	2:18:32 PM	Helium MFC set to  100.000000
11/18/2010	2:18:32 PM	H2 MFC set to  0.000000
11/18/2010	2:18:32 PM	BCl3 MFC set to  0.000000
11/18/2010	2:18:32 PM	PHl3 MFC set to  0.000000
11/18/2010	2:18:32 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:18:32 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:18:32 PM	Tube furnace set to 0
11/18/2010	2:19:32 PM	Helium valve closed
11/18/2010	2:19:32 PM	H2 valve closed
11/18/2010	2:19:32 PM	BCl3 valve closed
11/18/2010	2:19:32 PM	PH3 valve closed
11/18/2010	2:19:32 PM	SiCl4 pre valve closed
11/18/2010	2:19:32 PM	SiCl4 post valve closed
11/18/2010	2:19:32 PM	Bubbler valve closed
11/18/2010	2:19:32 PM	Main Vac valve opened
11/18/2010	2:19:32 PM	Bypass valve opened
11/18/2010	2:19:32 PM	Helium MFC set to  0.000000
11/18/2010	2:19:32 PM	H2 MFC set to  0.000000
11/18/2010	2:19:32 PM	BCl3 MFC set to  0.000000
11/18/2010	2:19:32 PM	PHl3 MFC set to  0.000000
11/18/2010	2:19:32 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:19:32 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:19:32 PM	Tube furnace set to 0
11/18/2010	2:20:32 PM	H2 valve closed
11/18/2010	2:20:32 PM	BCl3 valve closed
11/18/2010	2:20:32 PM	PH3 valve closed
11/18/2010	2:20:32 PM	SiCl4 pre valve closed
11/18/2010	2:20:32 PM	SiCl4 post valve closed
11/18/2010	2:20:32 PM	Bubbler valve closed
11/18/2010	2:20:32 PM	Helium valve opened
11/18/2010	2:20:32 PM	Main Vac valve opened
11/18/2010	2:20:32 PM	Bypass valve opened
11/18/2010	2:20:32 PM	Helium MFC set to  100.000000
11/18/2010	2:20:32 PM	H2 MFC set to  0.000000
11/18/2010	2:20:32 PM	BCl3 MFC set to  0.000000
11/18/2010	2:20:32 PM	PHl3 MFC set to  0.000000
11/18/2010	2:20:32 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:20:32 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:20:33 PM	Tube furnace set to 0
11/18/2010	2:21:33 PM	Helium valve closed
11/18/2010	2:21:33 PM	H2 valve closed
11/18/2010	2:21:33 PM	BCl3 valve closed
11/18/2010	2:21:33 PM	PH3 valve closed
11/18/2010	2:21:33 PM	SiCl4 pre valve closed
11/18/2010	2:21:33 PM	SiCl4 post valve closed
11/18/2010	2:21:33 PM	Bubbler valve closed
11/18/2010	2:21:33 PM	Main Vac valve opened
11/18/2010	2:21:33 PM	Bypass valve opened
11/18/2010	2:21:33 PM	Helium MFC set to  0.000000
11/18/2010	2:21:33 PM	H2 MFC set to  0.000000
11/18/2010	2:21:33 PM	BCl3 MFC set to  0.000000
11/18/2010	2:21:33 PM	PHl3 MFC set to  0.000000
11/18/2010	2:21:33 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:21:33 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:21:33 PM	Tube furnace set to 0
11/18/2010	2:22:33 PM	H2 valve closed
11/18/2010	2:22:33 PM	BCl3 valve closed
11/18/2010	2:22:33 PM	PH3 valve closed
11/18/2010	2:22:33 PM	SiCl4 pre valve closed
11/18/2010	2:22:33 PM	SiCl4 post valve closed
11/18/2010	2:22:33 PM	Bubbler valve closed
11/18/2010	2:22:33 PM	Helium valve opened
11/18/2010	2:22:33 PM	Main Vac valve opened
11/18/2010	2:22:33 PM	Bypass valve opened
11/18/2010	2:22:33 PM	Helium MFC set to  100.000000
11/18/2010	2:22:33 PM	H2 MFC set to  0.000000
11/18/2010	2:22:33 PM	BCl3 MFC set to  0.000000
11/18/2010	2:22:33 PM	PHl3 MFC set to  0.000000
11/18/2010	2:22:33 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:22:33 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:22:33 PM	Tube furnace set to 0
11/18/2010	2:23:33 PM	Helium valve closed
11/18/2010	2:23:33 PM	H2 valve closed
11/18/2010	2:23:33 PM	BCl3 valve closed
11/18/2010	2:23:33 PM	PH3 valve closed
11/18/2010	2:23:33 PM	SiCl4 pre valve closed
11/18/2010	2:23:33 PM	SiCl4 post valve closed
11/18/2010	2:23:33 PM	Bubbler valve closed
11/18/2010	2:23:33 PM	Main Vac valve opened
11/18/2010	2:23:33 PM	Bypass valve opened
11/18/2010	2:23:33 PM	Helium MFC set to  0.000000
11/18/2010	2:23:33 PM	H2 MFC set to  0.000000
11/18/2010	2:23:33 PM	BCl3 MFC set to  0.000000
11/18/2010	2:23:33 PM	PHl3 MFC set to  0.000000
11/18/2010	2:23:33 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:23:33 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:23:33 PM	Tube furnace set to 0
11/18/2010	2:24:33 PM	H2 valve closed
11/18/2010	2:24:33 PM	BCl3 valve closed
11/18/2010	2:24:33 PM	PH3 valve closed
11/18/2010	2:24:33 PM	SiCl4 pre valve closed
11/18/2010	2:24:33 PM	SiCl4 post valve closed
11/18/2010	2:24:33 PM	Bubbler valve closed
11/18/2010	2:24:33 PM	Helium valve opened
11/18/2010	2:24:33 PM	Main Vac valve opened
11/18/2010	2:24:33 PM	Bypass valve opened
11/18/2010	2:24:33 PM	Helium MFC set to  100.000000
11/18/2010	2:24:33 PM	H2 MFC set to  0.000000
11/18/2010	2:24:33 PM	BCl3 MFC set to  0.000000
11/18/2010	2:24:33 PM	PHl3 MFC set to  0.000000
11/18/2010	2:24:33 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:24:33 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:24:33 PM	Tube furnace set to 0
11/18/2010	2:25:33 PM	Helium valve closed
11/18/2010	2:25:33 PM	H2 valve closed
11/18/2010	2:25:33 PM	BCl3 valve closed
11/18/2010	2:25:33 PM	PH3 valve closed
11/18/2010	2:25:33 PM	SiCl4 pre valve closed
11/18/2010	2:25:33 PM	SiCl4 post valve closed
11/18/2010	2:25:33 PM	Bubbler valve closed
11/18/2010	2:25:33 PM	Main Vac valve opened
11/18/2010	2:25:33 PM	Bypass valve opened
11/18/2010	2:25:33 PM	Helium MFC set to  0.000000
11/18/2010	2:25:33 PM	H2 MFC set to  0.000000
11/18/2010	2:25:33 PM	BCl3 MFC set to  0.000000
11/18/2010	2:25:33 PM	PHl3 MFC set to  0.000000
11/18/2010	2:25:33 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:25:33 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:25:34 PM	Tube furnace set to 0
11/18/2010	2:25:35 PM	Run finished at 2:25 PM
11/18/2010	2:25:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/18/2010	2:37:34 PM	Helium MFC set to  100.000000
11/18/2010	2:37:35 PM	Helium valve opened
11/18/2010	2:46:13 PM	Helium valve closed
11/18/2010	2:53:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2010	2:53:26 PM	Recipe started at 2:53 PM
11/18/2010	2:53:26 PM	H2 valve closed
11/18/2010	2:53:26 PM	BCl3 valve closed
11/18/2010	2:53:26 PM	PH3 valve closed
11/18/2010	2:53:26 PM	SiCl4 pre valve closed
11/18/2010	2:53:26 PM	SiCl4 post valve closed
11/18/2010	2:53:26 PM	Main Vac valve closed
11/18/2010	2:53:26 PM	Bypass valve closed
11/18/2010	2:53:26 PM	Bubbler valve closed
11/18/2010	2:53:26 PM	Helium valve opened
11/18/2010	2:53:26 PM	Helium MFC set to  500.000000
11/18/2010	2:53:26 PM	H2 MFC set to  0.000000
11/18/2010	2:53:26 PM	BCl3 MFC set to  0.000000
11/18/2010	2:53:26 PM	PHl3 MFC set to  0.000000
11/18/2010	2:53:26 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:53:26 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:53:27 PM	Tube furnace set to 0
11/18/2010	2:54:47 PM	Helium valve closed
11/18/2010	2:54:47 PM	H2 valve closed
11/18/2010	2:54:47 PM	BCl3 valve closed
11/18/2010	2:54:47 PM	PH3 valve closed
11/18/2010	2:54:47 PM	SiCl4 pre valve closed
11/18/2010	2:54:47 PM	SiCl4 post valve closed
11/18/2010	2:54:47 PM	Main Vac valve closed
11/18/2010	2:54:47 PM	Bypass valve closed
11/18/2010	2:54:47 PM	Bubbler valve closed
11/18/2010	2:54:47 PM	Helium MFC set to  0.000000
11/18/2010	2:54:47 PM	H2 MFC set to  0.000000
11/18/2010	2:54:47 PM	BCl3 MFC set to  0.000000
11/18/2010	2:54:47 PM	PHl3 MFC set to  0.000000
11/18/2010	2:54:47 PM	SiCl4 MFC set to  0.000000
11/18/2010	2:54:47 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	2:54:47 PM	Tube furnace set to 0
11/18/2010	2:54:48 PM	Run finished at 2:54 PM
11/18/2010	2:54:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2010	3:00:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/18/2010	3:00:16 PM	Recipe started at 3:00 PM
11/18/2010	3:00:16 PM	Helium valve closed
11/18/2010	3:00:16 PM	H2 valve closed
11/18/2010	3:00:16 PM	BCl3 valve closed
11/18/2010	3:00:16 PM	PH3 valve closed
11/18/2010	3:00:16 PM	SiCl4 pre valve closed
11/18/2010	3:00:16 PM	SiCl4 post valve closed
11/18/2010	3:00:16 PM	Main Vac valve closed
11/18/2010	3:00:16 PM	Bubbler valve closed
11/18/2010	3:00:16 PM	Bypass valve opened
11/18/2010	3:00:16 PM	Helium MFC set to  0.000000
11/18/2010	3:00:16 PM	H2 MFC set to  0.000000
11/18/2010	3:00:16 PM	BCl3 MFC set to  0.000000
11/18/2010	3:00:16 PM	PHl3 MFC set to  0.000000
11/18/2010	3:00:16 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:00:16 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:00:16 PM	Tube furnace set to 0
11/18/2010	3:01:07 PM	Helium valve closed
11/18/2010	3:01:07 PM	H2 valve closed
11/18/2010	3:01:07 PM	BCl3 valve closed
11/18/2010	3:01:07 PM	PH3 valve closed
11/18/2010	3:01:07 PM	SiCl4 pre valve closed
11/18/2010	3:01:07 PM	SiCl4 post valve closed
11/18/2010	3:01:07 PM	Bubbler valve closed
11/18/2010	3:01:07 PM	Main Vac valve opened
11/18/2010	3:01:07 PM	Bypass valve opened
11/18/2010	3:01:07 PM	Helium MFC set to  0.000000
11/18/2010	3:01:07 PM	H2 MFC set to  0.000000
11/18/2010	3:01:07 PM	BCl3 MFC set to  0.000000
11/18/2010	3:01:07 PM	PHl3 MFC set to  0.000000
11/18/2010	3:01:07 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:01:07 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:01:07 PM	Tube furnace set to 0
11/18/2010	3:02:07 PM	H2 valve closed
11/18/2010	3:02:07 PM	BCl3 valve closed
11/18/2010	3:02:07 PM	PH3 valve closed
11/18/2010	3:02:07 PM	SiCl4 pre valve closed
11/18/2010	3:02:07 PM	SiCl4 post valve closed
11/18/2010	3:02:07 PM	Bubbler valve closed
11/18/2010	3:02:07 PM	Helium valve opened
11/18/2010	3:02:07 PM	Main Vac valve opened
11/18/2010	3:02:07 PM	Bypass valve opened
11/18/2010	3:02:07 PM	Helium MFC set to  100.000000
11/18/2010	3:02:07 PM	H2 MFC set to  0.000000
11/18/2010	3:02:07 PM	BCl3 MFC set to  0.000000
11/18/2010	3:02:07 PM	PHl3 MFC set to  0.000000
11/18/2010	3:02:07 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:02:07 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:02:07 PM	Tube furnace set to 0
11/18/2010	3:03:07 PM	Helium valve closed
11/18/2010	3:03:07 PM	H2 valve closed
11/18/2010	3:03:07 PM	BCl3 valve closed
11/18/2010	3:03:07 PM	PH3 valve closed
11/18/2010	3:03:07 PM	SiCl4 pre valve closed
11/18/2010	3:03:07 PM	SiCl4 post valve closed
11/18/2010	3:03:07 PM	Bubbler valve closed
11/18/2010	3:03:07 PM	Main Vac valve opened
11/18/2010	3:03:07 PM	Bypass valve opened
11/18/2010	3:03:07 PM	Helium MFC set to  0.000000
11/18/2010	3:03:07 PM	H2 MFC set to  0.000000
11/18/2010	3:03:07 PM	BCl3 MFC set to  0.000000
11/18/2010	3:03:07 PM	PHl3 MFC set to  0.000000
11/18/2010	3:03:07 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:03:07 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:03:07 PM	Tube furnace set to 0
11/18/2010	3:04:07 PM	H2 valve closed
11/18/2010	3:04:07 PM	BCl3 valve closed
11/18/2010	3:04:07 PM	PH3 valve closed
11/18/2010	3:04:07 PM	SiCl4 pre valve closed
11/18/2010	3:04:07 PM	SiCl4 post valve closed
11/18/2010	3:04:07 PM	Bubbler valve closed
11/18/2010	3:04:08 PM	Helium valve opened
11/18/2010	3:04:08 PM	Main Vac valve opened
11/18/2010	3:04:08 PM	Bypass valve opened
11/18/2010	3:04:08 PM	Helium MFC set to  100.000000
11/18/2010	3:04:08 PM	H2 MFC set to  0.000000
11/18/2010	3:04:08 PM	BCl3 MFC set to  0.000000
11/18/2010	3:04:08 PM	PHl3 MFC set to  0.000000
11/18/2010	3:04:08 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:04:08 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:04:08 PM	Tube furnace set to 0
11/18/2010	3:05:08 PM	Helium valve closed
11/18/2010	3:05:08 PM	H2 valve closed
11/18/2010	3:05:08 PM	BCl3 valve closed
11/18/2010	3:05:08 PM	PH3 valve closed
11/18/2010	3:05:08 PM	SiCl4 pre valve closed
11/18/2010	3:05:08 PM	SiCl4 post valve closed
11/18/2010	3:05:08 PM	Bubbler valve closed
11/18/2010	3:05:08 PM	Main Vac valve opened
11/18/2010	3:05:08 PM	Bypass valve opened
11/18/2010	3:05:08 PM	Helium MFC set to  0.000000
11/18/2010	3:05:08 PM	H2 MFC set to  0.000000
11/18/2010	3:05:08 PM	BCl3 MFC set to  0.000000
11/18/2010	3:05:08 PM	PHl3 MFC set to  0.000000
11/18/2010	3:05:08 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:05:08 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:05:08 PM	Tube furnace set to 0
11/18/2010	3:06:08 PM	H2 valve closed
11/18/2010	3:06:08 PM	BCl3 valve closed
11/18/2010	3:06:08 PM	PH3 valve closed
11/18/2010	3:06:08 PM	SiCl4 pre valve closed
11/18/2010	3:06:08 PM	SiCl4 post valve closed
11/18/2010	3:06:08 PM	Bubbler valve closed
11/18/2010	3:06:08 PM	Helium valve opened
11/18/2010	3:06:08 PM	Main Vac valve opened
11/18/2010	3:06:08 PM	Bypass valve opened
11/18/2010	3:06:08 PM	Helium MFC set to  100.000000
11/18/2010	3:06:08 PM	H2 MFC set to  0.000000
11/18/2010	3:06:08 PM	BCl3 MFC set to  0.000000
11/18/2010	3:06:08 PM	PHl3 MFC set to  0.000000
11/18/2010	3:06:08 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:06:08 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:06:08 PM	Tube furnace set to 0
11/18/2010	3:07:08 PM	Helium valve closed
11/18/2010	3:07:08 PM	H2 valve closed
11/18/2010	3:07:08 PM	BCl3 valve closed
11/18/2010	3:07:08 PM	PH3 valve closed
11/18/2010	3:07:08 PM	SiCl4 pre valve closed
11/18/2010	3:07:08 PM	SiCl4 post valve closed
11/18/2010	3:07:08 PM	Bubbler valve closed
11/18/2010	3:07:08 PM	Main Vac valve opened
11/18/2010	3:07:08 PM	Bypass valve opened
11/18/2010	3:07:08 PM	Helium MFC set to  0.000000
11/18/2010	3:07:08 PM	H2 MFC set to  0.000000
11/18/2010	3:07:08 PM	BCl3 MFC set to  0.000000
11/18/2010	3:07:08 PM	PHl3 MFC set to  0.000000
11/18/2010	3:07:08 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:07:08 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:07:08 PM	Tube furnace set to 0
11/18/2010	3:08:08 PM	H2 valve closed
11/18/2010	3:08:08 PM	BCl3 valve closed
11/18/2010	3:08:08 PM	PH3 valve closed
11/18/2010	3:08:08 PM	SiCl4 pre valve closed
11/18/2010	3:08:08 PM	SiCl4 post valve closed
11/18/2010	3:08:08 PM	Bubbler valve closed
11/18/2010	3:08:08 PM	Helium valve opened
11/18/2010	3:08:08 PM	Main Vac valve opened
11/18/2010	3:08:08 PM	Bypass valve opened
11/18/2010	3:08:08 PM	Helium MFC set to  100.000000
11/18/2010	3:08:08 PM	H2 MFC set to  0.000000
11/18/2010	3:08:08 PM	BCl3 MFC set to  0.000000
11/18/2010	3:08:08 PM	PHl3 MFC set to  0.000000
11/18/2010	3:08:08 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:08:08 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:08:08 PM	Tube furnace set to 0
11/18/2010	3:08:31 PM	Helium valve closed
11/18/2010	3:08:31 PM	H2 valve closed
11/18/2010	3:08:31 PM	BCl3 valve closed
11/18/2010	3:08:31 PM	PH3 valve closed
11/18/2010	3:08:31 PM	SiCl4 pre valve closed
11/18/2010	3:08:31 PM	SiCl4 post valve closed
11/18/2010	3:08:31 PM	Bubbler valve closed
11/18/2010	3:08:31 PM	Main Vac valve opened
11/18/2010	3:08:31 PM	Bypass valve opened
11/18/2010	3:08:31 PM	Helium MFC set to  0.000000
11/18/2010	3:08:31 PM	H2 MFC set to  0.000000
11/18/2010	3:08:31 PM	BCl3 MFC set to  0.000000
11/18/2010	3:08:31 PM	PHl3 MFC set to  0.000000
11/18/2010	3:08:31 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:08:31 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:08:31 PM	Tube furnace set to 0
11/18/2010	3:09:31 PM	H2 valve closed
11/18/2010	3:09:31 PM	BCl3 valve closed
11/18/2010	3:09:31 PM	PH3 valve closed
11/18/2010	3:09:31 PM	SiCl4 pre valve closed
11/18/2010	3:09:31 PM	SiCl4 post valve closed
11/18/2010	3:09:31 PM	Bubbler valve closed
11/18/2010	3:09:31 PM	Helium valve opened
11/18/2010	3:09:31 PM	Main Vac valve opened
11/18/2010	3:09:31 PM	Bypass valve opened
11/18/2010	3:09:31 PM	Helium MFC set to  100.000000
11/18/2010	3:09:31 PM	H2 MFC set to  0.000000
11/18/2010	3:09:31 PM	BCl3 MFC set to  0.000000
11/18/2010	3:09:31 PM	PHl3 MFC set to  0.000000
11/18/2010	3:09:31 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:09:31 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:09:32 PM	Tube furnace set to 0
11/18/2010	3:10:32 PM	Helium valve closed
11/18/2010	3:10:32 PM	H2 valve closed
11/18/2010	3:10:32 PM	BCl3 valve closed
11/18/2010	3:10:32 PM	PH3 valve closed
11/18/2010	3:10:32 PM	SiCl4 pre valve closed
11/18/2010	3:10:32 PM	SiCl4 post valve closed
11/18/2010	3:10:32 PM	Bubbler valve closed
11/18/2010	3:10:32 PM	Main Vac valve opened
11/18/2010	3:10:32 PM	Bypass valve opened
11/18/2010	3:10:32 PM	Helium MFC set to  0.000000
11/18/2010	3:10:32 PM	H2 MFC set to  0.000000
11/18/2010	3:10:32 PM	BCl3 MFC set to  0.000000
11/18/2010	3:10:32 PM	PHl3 MFC set to  0.000000
11/18/2010	3:10:32 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:10:32 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:10:32 PM	Tube furnace set to 0
11/18/2010	3:11:32 PM	H2 valve closed
11/18/2010	3:11:32 PM	BCl3 valve closed
11/18/2010	3:11:32 PM	PH3 valve closed
11/18/2010	3:11:32 PM	SiCl4 pre valve closed
11/18/2010	3:11:32 PM	SiCl4 post valve closed
11/18/2010	3:11:32 PM	Bubbler valve closed
11/18/2010	3:11:32 PM	Helium valve opened
11/18/2010	3:11:32 PM	Main Vac valve opened
11/18/2010	3:11:32 PM	Bypass valve opened
11/18/2010	3:11:32 PM	Helium MFC set to  100.000000
11/18/2010	3:11:32 PM	H2 MFC set to  0.000000
11/18/2010	3:11:32 PM	BCl3 MFC set to  0.000000
11/18/2010	3:11:32 PM	PHl3 MFC set to  0.000000
11/18/2010	3:11:32 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:11:32 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:11:32 PM	Tube furnace set to 0
11/18/2010	3:12:32 PM	Helium valve closed
11/18/2010	3:12:32 PM	H2 valve closed
11/18/2010	3:12:32 PM	BCl3 valve closed
11/18/2010	3:12:32 PM	PH3 valve closed
11/18/2010	3:12:32 PM	SiCl4 pre valve closed
11/18/2010	3:12:32 PM	SiCl4 post valve closed
11/18/2010	3:12:32 PM	Bubbler valve closed
11/18/2010	3:12:32 PM	Main Vac valve opened
11/18/2010	3:12:32 PM	Bypass valve opened
11/18/2010	3:12:32 PM	Helium MFC set to  0.000000
11/18/2010	3:12:32 PM	H2 MFC set to  0.000000
11/18/2010	3:12:32 PM	BCl3 MFC set to  0.000000
11/18/2010	3:12:32 PM	PHl3 MFC set to  0.000000
11/18/2010	3:12:32 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:12:32 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:12:32 PM	Tube furnace set to 0
11/18/2010	3:13:32 PM	H2 valve closed
11/18/2010	3:13:32 PM	BCl3 valve closed
11/18/2010	3:13:32 PM	PH3 valve closed
11/18/2010	3:13:32 PM	SiCl4 pre valve closed
11/18/2010	3:13:32 PM	SiCl4 post valve closed
11/18/2010	3:13:32 PM	Bubbler valve closed
11/18/2010	3:13:32 PM	Helium valve opened
11/18/2010	3:13:32 PM	Main Vac valve opened
11/18/2010	3:13:32 PM	Bypass valve opened
11/18/2010	3:13:32 PM	Helium MFC set to  100.000000
11/18/2010	3:13:32 PM	H2 MFC set to  0.000000
11/18/2010	3:13:32 PM	BCl3 MFC set to  0.000000
11/18/2010	3:13:32 PM	PHl3 MFC set to  0.000000
11/18/2010	3:13:32 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:13:32 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:13:32 PM	Tube furnace set to 0
11/18/2010	3:14:32 PM	Helium valve closed
11/18/2010	3:14:32 PM	H2 valve closed
11/18/2010	3:14:32 PM	BCl3 valve closed
11/18/2010	3:14:32 PM	PH3 valve closed
11/18/2010	3:14:32 PM	SiCl4 pre valve closed
11/18/2010	3:14:32 PM	SiCl4 post valve closed
11/18/2010	3:14:32 PM	Bubbler valve closed
11/18/2010	3:14:32 PM	Main Vac valve opened
11/18/2010	3:14:32 PM	Bypass valve opened
11/18/2010	3:14:32 PM	Helium MFC set to  0.000000
11/18/2010	3:14:32 PM	H2 MFC set to  0.000000
11/18/2010	3:14:32 PM	BCl3 MFC set to  0.000000
11/18/2010	3:14:32 PM	PHl3 MFC set to  0.000000
11/18/2010	3:14:32 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:14:32 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:14:33 PM	Tube furnace set to 0
11/18/2010	3:15:33 PM	H2 valve closed
11/18/2010	3:15:33 PM	BCl3 valve closed
11/18/2010	3:15:33 PM	PH3 valve closed
11/18/2010	3:15:33 PM	SiCl4 pre valve closed
11/18/2010	3:15:33 PM	SiCl4 post valve closed
11/18/2010	3:15:33 PM	Bubbler valve closed
11/18/2010	3:15:33 PM	Helium valve opened
11/18/2010	3:15:33 PM	Main Vac valve opened
11/18/2010	3:15:33 PM	Bypass valve opened
11/18/2010	3:15:33 PM	Helium MFC set to  100.000000
11/18/2010	3:15:33 PM	H2 MFC set to  0.000000
11/18/2010	3:15:33 PM	BCl3 MFC set to  0.000000
11/18/2010	3:15:33 PM	PHl3 MFC set to  0.000000
11/18/2010	3:15:33 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:15:33 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:15:33 PM	Tube furnace set to 0
11/18/2010	3:16:33 PM	Helium valve closed
11/18/2010	3:16:33 PM	H2 valve closed
11/18/2010	3:16:33 PM	BCl3 valve closed
11/18/2010	3:16:33 PM	PH3 valve closed
11/18/2010	3:16:33 PM	SiCl4 pre valve closed
11/18/2010	3:16:33 PM	SiCl4 post valve closed
11/18/2010	3:16:33 PM	Bubbler valve closed
11/18/2010	3:16:33 PM	Main Vac valve opened
11/18/2010	3:16:33 PM	Bypass valve opened
11/18/2010	3:16:33 PM	Helium MFC set to  0.000000
11/18/2010	3:16:33 PM	H2 MFC set to  0.000000
11/18/2010	3:16:33 PM	BCl3 MFC set to  0.000000
11/18/2010	3:16:33 PM	PHl3 MFC set to  0.000000
11/18/2010	3:16:33 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:16:33 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:16:33 PM	Tube furnace set to 0
11/18/2010	3:17:33 PM	H2 valve closed
11/18/2010	3:17:33 PM	BCl3 valve closed
11/18/2010	3:17:33 PM	PH3 valve closed
11/18/2010	3:17:33 PM	SiCl4 pre valve closed
11/18/2010	3:17:33 PM	SiCl4 post valve closed
11/18/2010	3:17:33 PM	Bubbler valve closed
11/18/2010	3:17:33 PM	Helium valve opened
11/18/2010	3:17:33 PM	Main Vac valve opened
11/18/2010	3:17:33 PM	Bypass valve opened
11/18/2010	3:17:33 PM	Helium MFC set to  100.000000
11/18/2010	3:17:33 PM	H2 MFC set to  0.000000
11/18/2010	3:17:33 PM	BCl3 MFC set to  0.000000
11/18/2010	3:17:33 PM	PHl3 MFC set to  0.000000
11/18/2010	3:17:33 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:17:33 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:17:33 PM	Tube furnace set to 0
11/18/2010	3:18:33 PM	Helium valve closed
11/18/2010	3:18:33 PM	H2 valve closed
11/18/2010	3:18:33 PM	BCl3 valve closed
11/18/2010	3:18:33 PM	PH3 valve closed
11/18/2010	3:18:33 PM	SiCl4 pre valve closed
11/18/2010	3:18:33 PM	SiCl4 post valve closed
11/18/2010	3:18:33 PM	Bubbler valve closed
11/18/2010	3:18:33 PM	Main Vac valve opened
11/18/2010	3:18:33 PM	Bypass valve opened
11/18/2010	3:18:33 PM	Helium MFC set to  0.000000
11/18/2010	3:18:33 PM	H2 MFC set to  0.000000
11/18/2010	3:18:33 PM	BCl3 MFC set to  0.000000
11/18/2010	3:18:33 PM	PHl3 MFC set to  0.000000
11/18/2010	3:18:33 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:18:33 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:18:33 PM	Tube furnace set to 0
11/18/2010	3:19:33 PM	H2 valve closed
11/18/2010	3:19:33 PM	BCl3 valve closed
11/18/2010	3:19:33 PM	PH3 valve closed
11/18/2010	3:19:33 PM	SiCl4 pre valve closed
11/18/2010	3:19:33 PM	SiCl4 post valve closed
11/18/2010	3:19:33 PM	Bubbler valve closed
11/18/2010	3:19:33 PM	Helium valve opened
11/18/2010	3:19:33 PM	Main Vac valve opened
11/18/2010	3:19:33 PM	Bypass valve opened
11/18/2010	3:19:33 PM	Helium MFC set to  100.000000
11/18/2010	3:19:33 PM	H2 MFC set to  0.000000
11/18/2010	3:19:33 PM	BCl3 MFC set to  0.000000
11/18/2010	3:19:33 PM	PHl3 MFC set to  0.000000
11/18/2010	3:19:33 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:19:33 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:19:34 PM	Tube furnace set to 0
11/18/2010	3:20:34 PM	Helium valve closed
11/18/2010	3:20:34 PM	H2 valve closed
11/18/2010	3:20:34 PM	BCl3 valve closed
11/18/2010	3:20:34 PM	PH3 valve closed
11/18/2010	3:20:34 PM	SiCl4 pre valve closed
11/18/2010	3:20:34 PM	SiCl4 post valve closed
11/18/2010	3:20:34 PM	Bubbler valve closed
11/18/2010	3:20:34 PM	Main Vac valve opened
11/18/2010	3:20:34 PM	Bypass valve opened
11/18/2010	3:20:34 PM	Helium MFC set to  0.000000
11/18/2010	3:20:34 PM	H2 MFC set to  0.000000
11/18/2010	3:20:34 PM	BCl3 MFC set to  0.000000
11/18/2010	3:20:34 PM	PHl3 MFC set to  0.000000
11/18/2010	3:20:34 PM	SiCl4 MFC set to  0.000000
11/18/2010	3:20:34 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	3:20:34 PM	Tube furnace set to 0
11/18/2010	3:20:35 PM	Run finished at 3:20 PM
11/18/2010	3:20:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
11/18/2010	4:00:36 PM	Helium MFC set to  100.000000
11/18/2010	4:00:37 PM	Helium valve opened
11/18/2010	4:06:03 PM	Helium valve closed
11/18/2010	4:29:05 PM	Helium valve opened
11/18/2010	4:29:07 PM	Helium valve closed
11/18/2010	4:30:10 PM	Recipe started at 4:30 PM
11/18/2010	4:30:10 PM	Helium valve closed
11/18/2010	4:30:10 PM	BCl3 valve closed
11/18/2010	4:30:10 PM	PH3 valve closed
11/18/2010	4:30:10 PM	SiCl4 pre valve closed
11/18/2010	4:30:10 PM	SiCl4 post valve closed
11/18/2010	4:30:10 PM	Main Vac valve closed
11/18/2010	4:30:10 PM	Bypass valve closed
11/18/2010	4:30:10 PM	Bubbler valve closed
11/18/2010	4:30:10 PM	H2 valve opened
11/18/2010	4:30:10 PM	Helium MFC set to  0.000000
11/18/2010	4:30:10 PM	H2 MFC set to  500.000000
11/18/2010	4:30:10 PM	BCl3 MFC set to  0.000000
11/18/2010	4:30:10 PM	PHl3 MFC set to  0.000000
11/18/2010	4:30:10 PM	SiCl4 MFC set to  0.000000
11/18/2010	4:30:10 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	4:30:10 PM	Tube furnace set to 0
11/18/2010	4:31:33 PM	Helium valve closed
11/18/2010	4:31:33 PM	BCl3 valve closed
11/18/2010	4:31:33 PM	PH3 valve closed
11/18/2010	4:31:33 PM	SiCl4 pre valve closed
11/18/2010	4:31:33 PM	SiCl4 post valve closed
11/18/2010	4:31:33 PM	Main Vac valve closed
11/18/2010	4:31:33 PM	Bypass valve closed
11/18/2010	4:31:33 PM	H2 valve opened
11/18/2010	4:31:33 PM	Bubbler valve opened
11/18/2010	4:31:33 PM	Helium MFC set to  0.000000
11/18/2010	4:31:33 PM	H2 MFC set to  500.000000
11/18/2010	4:31:33 PM	BCl3 MFC set to  0.000000
11/18/2010	4:31:33 PM	PHl3 MFC set to  0.000000
11/18/2010	4:31:33 PM	SiCl4 MFC set to  0.000000
11/18/2010	4:31:33 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	4:31:33 PM	Tube furnace set to 1000
11/18/2010	4:51:33 PM	Helium valve closed
11/18/2010	4:51:33 PM	PH3 valve closed
11/18/2010	4:51:33 PM	Main Vac valve closed
11/18/2010	4:51:33 PM	Bypass valve closed
11/18/2010	4:51:33 PM	H2 valve opened
11/18/2010	4:51:33 PM	BCl3 valve opened
11/18/2010	4:51:33 PM	SiCl4 pre valve opened
11/18/2010	4:51:33 PM	SiCl4 post valve opened
11/18/2010	4:51:33 PM	Bubbler valve opened
11/18/2010	4:51:33 PM	Helium MFC set to  0.000000
11/18/2010	4:51:33 PM	H2 MFC set to  500.000000
11/18/2010	4:51:33 PM	BCl3 MFC set to  12.000000
11/18/2010	4:51:33 PM	PHl3 MFC set to  0.000000
11/18/2010	4:51:33 PM	SiCl4 MFC set to  50.000000
11/18/2010	4:51:33 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	4:51:33 PM	Tube furnace set to 1000
11/18/2010	5:06:33 PM	H2 valve closed
11/18/2010	5:06:33 PM	BCl3 valve closed
11/18/2010	5:06:33 PM	PH3 valve closed
11/18/2010	5:06:33 PM	SiCl4 pre valve closed
11/18/2010	5:06:33 PM	SiCl4 post valve closed
11/18/2010	5:06:33 PM	Main Vac valve closed
11/18/2010	5:06:33 PM	Bypass valve closed
11/18/2010	5:06:33 PM	Helium valve opened
11/18/2010	5:06:33 PM	Bubbler valve opened
11/18/2010	5:06:33 PM	Helium MFC set to  500.000000
11/18/2010	5:06:33 PM	H2 MFC set to  0.000000
11/18/2010	5:06:33 PM	BCl3 MFC set to  0.000000
11/18/2010	5:06:33 PM	PHl3 MFC set to  0.000000
11/18/2010	5:06:33 PM	SiCl4 MFC set to  0.000000
11/18/2010	5:06:33 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	5:06:33 PM	Tube furnace set to 950
11/18/2010	5:08:23 PM	Run aborted at 5:08 PM
11/18/2010	5:08:23 PM	Helium valve closed
11/18/2010	5:08:23 PM	H2 valve closed
11/18/2010	5:08:23 PM	BCl3 valve closed
11/18/2010	5:08:23 PM	PH3 valve closed
11/18/2010	5:08:23 PM	SiCl4 pre valve closed
11/18/2010	5:08:23 PM	SiCl4 post valve closed
11/18/2010	5:08:23 PM	Bypass valve closed
11/18/2010	5:08:23 PM	Main Vac valve closed
11/18/2010	5:08:23 PM	Bubbler valve closed
11/18/2010	5:08:23 PM	Helium MFC set to  0.000000
11/18/2010	5:08:23 PM	H2 MFC set to  0.000000
11/18/2010	5:08:23 PM	BCl3 MFC set to  0.000000
11/18/2010	5:08:23 PM	PHl3 MFC set to  0.000000
11/18/2010	5:08:23 PM	SiCl4 MFC set to  0.000000
11/18/2010	5:08:23 PM	Tube furnace set to 0
11/18/2010	5:08:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2010	5:08:26 PM	Recipe started at 5:08 PM
11/18/2010	5:08:26 PM	Helium valve closed
11/18/2010	5:08:26 PM	H2 valve closed
11/18/2010	5:08:26 PM	BCl3 valve closed
11/18/2010	5:08:26 PM	PH3 valve closed
11/18/2010	5:08:26 PM	SiCl4 pre valve closed
11/18/2010	5:08:26 PM	SiCl4 post valve closed
11/18/2010	5:08:26 PM	Main Vac valve closed
11/18/2010	5:08:26 PM	Bubbler valve closed
11/18/2010	5:08:26 PM	Bypass valve opened
11/18/2010	5:08:26 PM	Helium MFC set to  0.000000
11/18/2010	5:08:26 PM	H2 MFC set to  0.000000
11/18/2010	5:08:26 PM	BCl3 MFC set to  0.000000
11/18/2010	5:08:26 PM	PHl3 MFC set to  0.000000
11/18/2010	5:08:26 PM	SiCl4 MFC set to  0.000000
11/18/2010	5:08:26 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	5:08:26 PM	Tube furnace set to 0
11/18/2010	5:09:03 PM	Helium valve closed
11/18/2010	5:09:03 PM	H2 valve closed
11/18/2010	5:09:03 PM	BCl3 valve closed
11/18/2010	5:09:03 PM	PH3 valve closed
11/18/2010	5:09:03 PM	SiCl4 pre valve closed
11/18/2010	5:09:03 PM	SiCl4 post valve closed
11/18/2010	5:09:03 PM	Bubbler valve closed
11/18/2010	5:09:03 PM	Main Vac valve opened
11/18/2010	5:09:03 PM	Bypass valve opened
11/18/2010	5:09:03 PM	Helium MFC set to  0.000000
11/18/2010	5:09:03 PM	H2 MFC set to  0.000000
11/18/2010	5:09:03 PM	BCl3 MFC set to  0.000000
11/18/2010	5:09:03 PM	PHl3 MFC set to  0.000000
11/18/2010	5:09:03 PM	SiCl4 MFC set to  0.000000
11/18/2010	5:09:03 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	5:09:03 PM	Tube furnace set to 0
11/18/2010	5:09:03 PM	Run finished at 5:09 PM
11/18/2010	5:09:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2010	5:10:17 PM	Main Vac valve closed
11/18/2010	5:10:17 PM	Bypass valve closed
11/18/2010	5:10:24 PM	Helium MFC set to  200.000000
11/18/2010	5:10:25 PM	Helium valve opened
11/18/2010	5:10:39 PM	Helium MFC set to  500.000000
11/18/2010	5:11:45 PM	Helium valve closed
11/18/2010	5:13:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2010	5:13:11 PM	Recipe started at 5:13 PM
11/18/2010	5:13:11 PM	Helium valve closed
11/18/2010	5:13:11 PM	H2 valve closed
11/18/2010	5:13:11 PM	BCl3 valve closed
11/18/2010	5:13:11 PM	PH3 valve closed
11/18/2010	5:13:11 PM	SiCl4 pre valve closed
11/18/2010	5:13:11 PM	SiCl4 post valve closed
11/18/2010	5:13:11 PM	Main Vac valve closed
11/18/2010	5:13:11 PM	Bubbler valve closed
11/18/2010	5:13:11 PM	Bypass valve opened
11/18/2010	5:13:11 PM	Helium MFC set to  0.000000
11/18/2010	5:13:11 PM	H2 MFC set to  0.000000
11/18/2010	5:13:11 PM	BCl3 MFC set to  0.000000
11/18/2010	5:13:11 PM	PHl3 MFC set to  0.000000
11/18/2010	5:13:11 PM	SiCl4 MFC set to  0.000000
11/18/2010	5:13:11 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	5:13:11 PM	Tube furnace set to 0
11/18/2010	5:13:43 PM	Helium valve closed
11/18/2010	5:13:43 PM	H2 valve closed
11/18/2010	5:13:43 PM	BCl3 valve closed
11/18/2010	5:13:43 PM	PH3 valve closed
11/18/2010	5:13:43 PM	SiCl4 pre valve closed
11/18/2010	5:13:43 PM	SiCl4 post valve closed
11/18/2010	5:13:43 PM	Bubbler valve closed
11/18/2010	5:13:43 PM	Main Vac valve opened
11/18/2010	5:13:43 PM	Bypass valve opened
11/18/2010	5:13:43 PM	Helium MFC set to  0.000000
11/18/2010	5:13:43 PM	H2 MFC set to  0.000000
11/18/2010	5:13:43 PM	BCl3 MFC set to  0.000000
11/18/2010	5:13:43 PM	PHl3 MFC set to  0.000000
11/18/2010	5:13:43 PM	SiCl4 MFC set to  0.000000
11/18/2010	5:13:43 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	5:13:43 PM	Tube furnace set to 0
11/18/2010	5:13:43 PM	Run finished at 5:13 PM
11/18/2010	5:13:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2010	5:14:26 PM	Bypass valve closed
11/18/2010	5:14:27 PM	Main Vac valve closed
11/18/2010	5:14:37 PM	Bypass valve opened
11/18/2010	5:14:37 PM	Main Vac valve opened
11/18/2010	5:18:39 PM	Bypass valve closed
11/18/2010	5:18:40 PM	Main Vac valve closed
11/18/2010	5:21:11 PM	Bypass valve opened
11/18/2010	5:21:11 PM	Main Vac valve opened
11/18/2010	5:29:47 PM	Recipe started at 5:29 PM
11/18/2010	5:29:47 PM	Helium valve closed
11/18/2010	5:29:47 PM	BCl3 valve closed
11/18/2010	5:29:47 PM	PH3 valve closed
11/18/2010	5:29:47 PM	SiCl4 pre valve closed
11/18/2010	5:29:47 PM	SiCl4 post valve closed
11/18/2010	5:29:47 PM	Main Vac valve closed
11/18/2010	5:29:47 PM	Bypass valve closed
11/18/2010	5:29:47 PM	Bubbler valve closed
11/18/2010	5:29:47 PM	H2 valve opened
11/18/2010	5:29:47 PM	Helium MFC set to  0.000000
11/18/2010	5:29:47 PM	H2 MFC set to  500.000000
11/18/2010	5:29:47 PM	BCl3 MFC set to  0.000000
11/18/2010	5:29:47 PM	PHl3 MFC set to  0.000000
11/18/2010	5:29:47 PM	SiCl4 MFC set to  0.000000
11/18/2010	5:29:47 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	5:29:47 PM	Tube furnace set to 0
11/18/2010	5:31:05 PM	Helium valve closed
11/18/2010	5:31:05 PM	BCl3 valve closed
11/18/2010	5:31:05 PM	PH3 valve closed
11/18/2010	5:31:05 PM	SiCl4 pre valve closed
11/18/2010	5:31:05 PM	SiCl4 post valve closed
11/18/2010	5:31:05 PM	Main Vac valve closed
11/18/2010	5:31:05 PM	Bypass valve closed
11/18/2010	5:31:05 PM	H2 valve opened
11/18/2010	5:31:05 PM	Bubbler valve opened
11/18/2010	5:31:05 PM	Helium MFC set to  0.000000
11/18/2010	5:31:05 PM	H2 MFC set to  500.000000
11/18/2010	5:31:05 PM	BCl3 MFC set to  0.000000
11/18/2010	5:31:05 PM	PHl3 MFC set to  0.000000
11/18/2010	5:31:05 PM	SiCl4 MFC set to  0.000000
11/18/2010	5:31:05 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	5:31:05 PM	Tube furnace set to 1000
11/18/2010	5:41:40 PM	Run aborted at 5:41 PM
11/18/2010	5:41:40 PM	Helium valve closed
11/18/2010	5:41:40 PM	H2 valve closed
11/18/2010	5:41:40 PM	BCl3 valve closed
11/18/2010	5:41:40 PM	PH3 valve closed
11/18/2010	5:41:40 PM	SiCl4 pre valve closed
11/18/2010	5:41:40 PM	SiCl4 post valve closed
11/18/2010	5:41:40 PM	Bypass valve closed
11/18/2010	5:41:40 PM	Main Vac valve closed
11/18/2010	5:41:40 PM	Bubbler valve closed
11/18/2010	5:41:40 PM	Helium MFC set to  0.000000
11/18/2010	5:41:40 PM	H2 MFC set to  0.000000
11/18/2010	5:41:40 PM	BCl3 MFC set to  0.000000
11/18/2010	5:41:40 PM	PHl3 MFC set to  0.000000
11/18/2010	5:41:40 PM	SiCl4 MFC set to  0.000000
11/18/2010	5:41:40 PM	Tube furnace set to 0
11/18/2010	5:41:51 PM	Program exited cleanly
11/18/2010	5:43:46 PM	Program started normally
11/18/2010	5:43:46 PM	Helium valve closed
11/18/2010	5:43:46 PM	H2 valve closed
11/18/2010	5:43:46 PM	BCl3 valve closed
11/18/2010	5:43:46 PM	PH3 valve closed
11/18/2010	5:43:46 PM	SiCl4 pre valve closed
11/18/2010	5:43:46 PM	SiCl4 post valve closed
11/18/2010	5:43:46 PM	Main Vac valve closed
11/18/2010	5:43:46 PM	Bypass valve closed
11/18/2010	5:43:46 PM	Bubbler valve closed
11/18/2010	5:43:46 PM	Helium MFC set to  0.000000
11/18/2010	5:43:46 PM	H2 MFC set to  0.000000
11/18/2010	5:43:46 PM	BCl3 MFC set to  0.000000
11/18/2010	5:43:46 PM	PHl3 MFC set to  0.000000
11/18/2010	5:43:46 PM	SiCl4 MFC set to  0.000000
11/18/2010	5:43:46 PM	Bypass solenoid MFC set to  760.000000
11/18/2010	5:43:46 PM	Tube furnace set to 0
11/18/2010	5:43:54 PM	Tube furnace set to 1000
11/18/2010	5:44:55 PM	Recipe started at 5:44 PM
11/18/2010	5:44:55 PM	Helium valve closed
11/18/2010	5:44:55 PM	BCl3 valve closed
11/18/2010	5:44:55 PM	PH3 valve closed
11/18/2010	5:44:55 PM	SiCl4 pre valve closed
11/18/2010	5:44:55 PM	SiCl4 post valve closed
11/18/2010	5:44:55 PM	Main Vac valve closed
11/18/2010	5:44:55 PM	Bypass valve closed
11/18/2010	5:44:55 PM	Bubbler valve closed
11/18/2010	5:44:55 PM	H2 valve opened
11/18/2010	5:44:55 PM	Helium MFC set to  0.000000
11/18/2010	5:44:55 PM	H2 MFC set to  500.000000
11/18/2010	5:44:55 PM	BCl3 MFC set to  0.000000
11/18/2010	5:44:55 PM	PHl3 MFC set to  0.000000
11/18/2010	5:44:55 PM	SiCl4 MFC set to  0.000000
11/18/2010	5:44:55 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	5:44:55 PM	Tube furnace set to 0
11/18/2010	5:44:56 PM	Helium valve closed
11/18/2010	5:44:56 PM	BCl3 valve closed
11/18/2010	5:44:56 PM	PH3 valve closed
11/18/2010	5:44:56 PM	SiCl4 pre valve closed
11/18/2010	5:44:56 PM	SiCl4 post valve closed
11/18/2010	5:44:56 PM	Main Vac valve closed
11/18/2010	5:44:56 PM	Bypass valve closed
11/18/2010	5:44:56 PM	H2 valve opened
11/18/2010	5:44:56 PM	Bubbler valve opened
11/18/2010	5:44:56 PM	Helium MFC set to  0.000000
11/18/2010	5:44:56 PM	H2 MFC set to  500.000000
11/18/2010	5:44:56 PM	BCl3 MFC set to  0.000000
11/18/2010	5:44:56 PM	PHl3 MFC set to  0.000000
11/18/2010	5:44:56 PM	SiCl4 MFC set to  0.000000
11/18/2010	5:44:56 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	5:44:57 PM	Tube furnace set to 1000
11/18/2010	5:50:01 PM	Helium valve closed
11/18/2010	5:50:01 PM	BCl3 valve closed
11/18/2010	5:50:01 PM	PH3 valve closed
11/18/2010	5:50:01 PM	Main Vac valve closed
11/18/2010	5:50:01 PM	Bypass valve closed
11/18/2010	5:50:01 PM	H2 valve opened
11/18/2010	5:50:01 PM	SiCl4 pre valve opened
11/18/2010	5:50:01 PM	SiCl4 post valve opened
11/18/2010	5:50:01 PM	Bubbler valve opened
11/18/2010	5:50:01 PM	Helium MFC set to  0.000000
11/18/2010	5:50:01 PM	H2 MFC set to  500.000000
11/18/2010	5:50:01 PM	BCl3 MFC set to  0.000000
11/18/2010	5:50:01 PM	PHl3 MFC set to  0.000000
11/18/2010	5:50:01 PM	SiCl4 MFC set to  50.000000
11/18/2010	5:50:01 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	5:50:01 PM	Tube furnace set to 1000
11/18/2010	5:57:14 PM	Run aborted at 5:57 PM
11/18/2010	5:57:14 PM	Helium valve closed
11/18/2010	5:57:14 PM	H2 valve closed
11/18/2010	5:57:14 PM	BCl3 valve closed
11/18/2010	5:57:14 PM	PH3 valve closed
11/18/2010	5:57:14 PM	SiCl4 pre valve closed
11/18/2010	5:57:14 PM	SiCl4 post valve closed
11/18/2010	5:57:14 PM	Bypass valve closed
11/18/2010	5:57:14 PM	Main Vac valve closed
11/18/2010	5:57:14 PM	Bubbler valve closed
11/18/2010	5:57:14 PM	Helium MFC set to  0.000000
11/18/2010	5:57:14 PM	H2 MFC set to  0.000000
11/18/2010	5:57:14 PM	BCl3 MFC set to  0.000000
11/18/2010	5:57:14 PM	PHl3 MFC set to  0.000000
11/18/2010	5:57:14 PM	SiCl4 MFC set to  0.000000
11/18/2010	5:57:14 PM	Tube furnace set to 0
11/18/2010	5:57:53 PM	Bubbler valve opened
11/18/2010	5:57:53 PM	Bubbler valve closed
11/18/2010	5:58:20 PM	Bypass valve opened
11/18/2010	5:59:16 PM	Main Vac valve opened
11/18/2010	5:59:38 PM	Bypass valve closed
11/18/2010	5:59:39 PM	Main Vac valve closed
11/18/2010	5:59:48 PM	Bypass valve opened
11/18/2010	5:59:49 PM	Main Vac valve opened
11/18/2010	6:00:56 PM	Bypass valve closed
11/18/2010	6:00:57 PM	Main Vac valve closed
11/18/2010	6:01:24 PM	Bypass valve opened
11/18/2010	6:01:24 PM	Main Vac valve opened
11/18/2010	6:13:48 PM	Main Vac valve closed
11/18/2010	6:13:49 PM	Bypass valve closed
11/18/2010	6:14:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2010	6:14:18 PM	Recipe started at 6:14 PM
11/18/2010	6:14:18 PM	H2 valve closed
11/18/2010	6:14:18 PM	BCl3 valve closed
11/18/2010	6:14:18 PM	PH3 valve closed
11/18/2010	6:14:18 PM	SiCl4 pre valve closed
11/18/2010	6:14:18 PM	SiCl4 post valve closed
11/18/2010	6:14:18 PM	Main Vac valve closed
11/18/2010	6:14:18 PM	Bypass valve closed
11/18/2010	6:14:18 PM	Bubbler valve closed
11/18/2010	6:14:18 PM	Helium valve opened
11/18/2010	6:14:18 PM	Helium MFC set to  500.000000
11/18/2010	6:14:18 PM	H2 MFC set to  0.000000
11/18/2010	6:14:18 PM	BCl3 MFC set to  0.000000
11/18/2010	6:14:18 PM	PHl3 MFC set to  0.000000
11/18/2010	6:14:18 PM	SiCl4 MFC set to  0.000000
11/18/2010	6:14:18 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	6:14:19 PM	Tube furnace set to 0
11/18/2010	6:15:34 PM	Helium valve closed
11/18/2010	6:15:34 PM	H2 valve closed
11/18/2010	6:15:34 PM	BCl3 valve closed
11/18/2010	6:15:34 PM	PH3 valve closed
11/18/2010	6:15:34 PM	SiCl4 pre valve closed
11/18/2010	6:15:34 PM	SiCl4 post valve closed
11/18/2010	6:15:34 PM	Main Vac valve closed
11/18/2010	6:15:34 PM	Bypass valve closed
11/18/2010	6:15:34 PM	Bubbler valve closed
11/18/2010	6:15:34 PM	Helium MFC set to  0.000000
11/18/2010	6:15:34 PM	H2 MFC set to  0.000000
11/18/2010	6:15:34 PM	BCl3 MFC set to  0.000000
11/18/2010	6:15:34 PM	PHl3 MFC set to  0.000000
11/18/2010	6:15:34 PM	SiCl4 MFC set to  0.000000
11/18/2010	6:15:34 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	6:15:35 PM	Tube furnace set to 0
11/18/2010	6:15:35 PM	Run finished at 6:15 PM
11/18/2010	6:15:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2010	6:24:06 PM	Bypass valve opened
11/18/2010	6:28:35 PM	Bypass valve closed
11/18/2010	6:30:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2010	6:30:05 PM	Recipe started at 6:30 PM
11/18/2010	6:30:05 PM	H2 valve closed
11/18/2010	6:30:05 PM	BCl3 valve closed
11/18/2010	6:30:05 PM	PH3 valve closed
11/18/2010	6:30:05 PM	SiCl4 pre valve closed
11/18/2010	6:30:05 PM	SiCl4 post valve closed
11/18/2010	6:30:05 PM	Main Vac valve closed
11/18/2010	6:30:05 PM	Bypass valve closed
11/18/2010	6:30:05 PM	Bubbler valve closed
11/18/2010	6:30:05 PM	Helium valve opened
11/18/2010	6:30:05 PM	Helium MFC set to  500.000000
11/18/2010	6:30:05 PM	H2 MFC set to  0.000000
11/18/2010	6:30:05 PM	BCl3 MFC set to  0.000000
11/18/2010	6:30:05 PM	PHl3 MFC set to  0.000000
11/18/2010	6:30:05 PM	SiCl4 MFC set to  0.000000
11/18/2010	6:30:05 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	6:30:06 PM	Tube furnace set to 0
11/18/2010	6:30:06 PM	Helium valve closed
11/18/2010	6:30:06 PM	H2 valve closed
11/18/2010	6:30:06 PM	BCl3 valve closed
11/18/2010	6:30:06 PM	PH3 valve closed
11/18/2010	6:30:06 PM	SiCl4 pre valve closed
11/18/2010	6:30:06 PM	SiCl4 post valve closed
11/18/2010	6:30:06 PM	Main Vac valve closed
11/18/2010	6:30:06 PM	Bypass valve closed
11/18/2010	6:30:06 PM	Bubbler valve closed
11/18/2010	6:30:06 PM	Helium MFC set to  0.000000
11/18/2010	6:30:06 PM	H2 MFC set to  0.000000
11/18/2010	6:30:06 PM	BCl3 MFC set to  0.000000
11/18/2010	6:30:06 PM	PHl3 MFC set to  0.000000
11/18/2010	6:30:06 PM	SiCl4 MFC set to  0.000000
11/18/2010	6:30:06 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	6:30:06 PM	Tube furnace set to 0
11/18/2010	6:30:06 PM	Run finished at 6:30 PM
11/18/2010	6:30:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/18/2010	6:30:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2010	6:30:10 PM	Recipe started at 6:30 PM
11/18/2010	6:30:10 PM	Helium valve closed
11/18/2010	6:30:10 PM	H2 valve closed
11/18/2010	6:30:10 PM	BCl3 valve closed
11/18/2010	6:30:10 PM	PH3 valve closed
11/18/2010	6:30:10 PM	SiCl4 pre valve closed
11/18/2010	6:30:10 PM	SiCl4 post valve closed
11/18/2010	6:30:10 PM	Main Vac valve closed
11/18/2010	6:30:10 PM	Bubbler valve closed
11/18/2010	6:30:10 PM	Bypass valve opened
11/18/2010	6:30:10 PM	Helium MFC set to  0.000000
11/18/2010	6:30:10 PM	H2 MFC set to  0.000000
11/18/2010	6:30:10 PM	BCl3 MFC set to  0.000000
11/18/2010	6:30:10 PM	PHl3 MFC set to  0.000000
11/18/2010	6:30:10 PM	SiCl4 MFC set to  0.000000
11/18/2010	6:30:10 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	6:30:10 PM	Tube furnace set to 0
11/18/2010	6:31:07 PM	Helium valve closed
11/18/2010	6:31:07 PM	H2 valve closed
11/18/2010	6:31:07 PM	BCl3 valve closed
11/18/2010	6:31:07 PM	PH3 valve closed
11/18/2010	6:31:07 PM	SiCl4 pre valve closed
11/18/2010	6:31:07 PM	SiCl4 post valve closed
11/18/2010	6:31:07 PM	Bubbler valve closed
11/18/2010	6:31:07 PM	Main Vac valve opened
11/18/2010	6:31:07 PM	Bypass valve opened
11/18/2010	6:31:07 PM	Helium MFC set to  0.000000
11/18/2010	6:31:07 PM	H2 MFC set to  0.000000
11/18/2010	6:31:07 PM	BCl3 MFC set to  0.000000
11/18/2010	6:31:07 PM	PHl3 MFC set to  0.000000
11/18/2010	6:31:07 PM	SiCl4 MFC set to  0.000000
11/18/2010	6:31:07 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	6:31:08 PM	Tube furnace set to 0
11/18/2010	6:31:08 PM	Run finished at 6:31 PM
11/18/2010	6:31:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2010	6:39:21 PM	Bypass valve closed
11/18/2010	6:39:21 PM	Main Vac valve closed
11/18/2010	6:39:30 PM	Bypass valve opened
11/18/2010	6:39:30 PM	Main Vac valve opened
11/18/2010	6:39:32 PM	Helium MFC set to  100.000000
11/18/2010	6:39:33 PM	Helium valve opened
11/18/2010	6:41:47 PM	Helium valve closed
11/18/2010	6:44:00 PM	Recipe started at 6:43 PM
11/18/2010	6:44:00 PM	Helium valve closed
11/18/2010	6:44:00 PM	BCl3 valve closed
11/18/2010	6:44:00 PM	PH3 valve closed
11/18/2010	6:44:00 PM	SiCl4 pre valve closed
11/18/2010	6:44:00 PM	SiCl4 post valve closed
11/18/2010	6:44:00 PM	Main Vac valve closed
11/18/2010	6:44:00 PM	Bypass valve closed
11/18/2010	6:44:00 PM	Bubbler valve closed
11/18/2010	6:44:00 PM	H2 valve opened
11/18/2010	6:44:00 PM	Helium MFC set to  0.000000
11/18/2010	6:44:00 PM	H2 MFC set to  500.000000
11/18/2010	6:44:00 PM	BCl3 MFC set to  0.000000
11/18/2010	6:44:00 PM	PHl3 MFC set to  0.000000
11/18/2010	6:44:00 PM	SiCl4 MFC set to  0.000000
11/18/2010	6:44:00 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	6:44:00 PM	Tube furnace set to 0
11/18/2010	6:45:22 PM	Helium valve closed
11/18/2010	6:45:22 PM	BCl3 valve closed
11/18/2010	6:45:22 PM	PH3 valve closed
11/18/2010	6:45:22 PM	SiCl4 pre valve closed
11/18/2010	6:45:22 PM	SiCl4 post valve closed
11/18/2010	6:45:22 PM	Main Vac valve closed
11/18/2010	6:45:22 PM	Bypass valve closed
11/18/2010	6:45:22 PM	H2 valve opened
11/18/2010	6:45:22 PM	Bubbler valve opened
11/18/2010	6:45:22 PM	Helium MFC set to  0.000000
11/18/2010	6:45:22 PM	H2 MFC set to  500.000000
11/18/2010	6:45:22 PM	BCl3 MFC set to  0.000000
11/18/2010	6:45:22 PM	PHl3 MFC set to  0.000000
11/18/2010	6:45:22 PM	SiCl4 MFC set to  0.000000
11/18/2010	6:45:22 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	6:45:22 PM	Tube furnace set to 1000
11/18/2010	6:47:48 PM	Run aborted at 6:47 PM
11/18/2010	6:47:48 PM	Helium valve closed
11/18/2010	6:47:48 PM	H2 valve closed
11/18/2010	6:47:48 PM	BCl3 valve closed
11/18/2010	6:47:48 PM	PH3 valve closed
11/18/2010	6:47:48 PM	SiCl4 pre valve closed
11/18/2010	6:47:48 PM	SiCl4 post valve closed
11/18/2010	6:47:48 PM	Bypass valve closed
11/18/2010	6:47:48 PM	Main Vac valve closed
11/18/2010	6:47:48 PM	Bubbler valve closed
11/18/2010	6:47:48 PM	Helium MFC set to  0.000000
11/18/2010	6:47:48 PM	H2 MFC set to  0.000000
11/18/2010	6:47:48 PM	BCl3 MFC set to  0.000000
11/18/2010	6:47:48 PM	PHl3 MFC set to  0.000000
11/18/2010	6:47:48 PM	SiCl4 MFC set to  0.000000
11/18/2010	6:47:48 PM	Tube furnace set to 0
11/18/2010	6:47:53 PM	Recipe started at 6:47 PM
11/18/2010	6:47:53 PM	Helium valve closed
11/18/2010	6:47:53 PM	BCl3 valve closed
11/18/2010	6:47:53 PM	PH3 valve closed
11/18/2010	6:47:53 PM	SiCl4 pre valve closed
11/18/2010	6:47:53 PM	SiCl4 post valve closed
11/18/2010	6:47:53 PM	Main Vac valve closed
11/18/2010	6:47:53 PM	Bypass valve closed
11/18/2010	6:47:53 PM	Bubbler valve closed
11/18/2010	6:47:53 PM	H2 valve opened
11/18/2010	6:47:53 PM	Helium MFC set to  0.000000
11/18/2010	6:47:53 PM	H2 MFC set to  500.000000
11/18/2010	6:47:53 PM	BCl3 MFC set to  0.000000
11/18/2010	6:47:53 PM	PHl3 MFC set to  0.000000
11/18/2010	6:47:53 PM	SiCl4 MFC set to  0.000000
11/18/2010	6:47:53 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	6:47:53 PM	Tube furnace set to 0
11/18/2010	6:47:55 PM	Helium valve closed
11/18/2010	6:47:55 PM	BCl3 valve closed
11/18/2010	6:47:55 PM	PH3 valve closed
11/18/2010	6:47:55 PM	SiCl4 pre valve closed
11/18/2010	6:47:55 PM	SiCl4 post valve closed
11/18/2010	6:47:55 PM	Main Vac valve closed
11/18/2010	6:47:55 PM	Bypass valve closed
11/18/2010	6:47:55 PM	H2 valve opened
11/18/2010	6:47:55 PM	Bubbler valve opened
11/18/2010	6:47:55 PM	Helium MFC set to  0.000000
11/18/2010	6:47:55 PM	H2 MFC set to  500.000000
11/18/2010	6:47:55 PM	BCl3 MFC set to  0.000000
11/18/2010	6:47:55 PM	PHl3 MFC set to  0.000000
11/18/2010	6:47:55 PM	SiCl4 MFC set to  0.000000
11/18/2010	6:47:55 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	6:47:55 PM	Tube furnace set to 1000
11/18/2010	7:04:19 PM	Helium valve closed
11/18/2010	7:04:19 PM	BCl3 valve closed
11/18/2010	7:04:19 PM	PH3 valve closed
11/18/2010	7:04:19 PM	Main Vac valve closed
11/18/2010	7:04:19 PM	Bypass valve closed
11/18/2010	7:04:19 PM	H2 valve opened
11/18/2010	7:04:19 PM	SiCl4 pre valve opened
11/18/2010	7:04:19 PM	SiCl4 post valve opened
11/18/2010	7:04:19 PM	Bubbler valve opened
11/18/2010	7:04:19 PM	Helium MFC set to  0.000000
11/18/2010	7:04:19 PM	H2 MFC set to  500.000000
11/18/2010	7:04:19 PM	BCl3 MFC set to  0.000000
11/18/2010	7:04:19 PM	PHl3 MFC set to  0.000000
11/18/2010	7:04:19 PM	SiCl4 MFC set to  50.000000
11/18/2010	7:04:19 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	7:04:19 PM	Tube furnace set to 1000
11/18/2010	8:04:20 PM	H2 valve closed
11/18/2010	8:04:20 PM	BCl3 valve closed
11/18/2010	8:04:20 PM	PH3 valve closed
11/18/2010	8:04:20 PM	SiCl4 pre valve closed
11/18/2010	8:04:20 PM	SiCl4 post valve closed
11/18/2010	8:04:20 PM	Main Vac valve closed
11/18/2010	8:04:20 PM	Bypass valve closed
11/18/2010	8:04:20 PM	Helium valve opened
11/18/2010	8:04:20 PM	Bubbler valve opened
11/18/2010	8:04:20 PM	Helium MFC set to  500.000000
11/18/2010	8:04:20 PM	H2 MFC set to  0.000000
11/18/2010	8:04:20 PM	BCl3 MFC set to  0.000000
11/18/2010	8:04:20 PM	PHl3 MFC set to  0.000000
11/18/2010	8:04:20 PM	SiCl4 MFC set to  0.000000
11/18/2010	8:04:20 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	8:04:20 PM	Tube furnace set to 950
11/18/2010	8:04:42 PM	Run aborted at 8:04 PM
11/18/2010	8:04:42 PM	Helium valve closed
11/18/2010	8:04:42 PM	H2 valve closed
11/18/2010	8:04:42 PM	BCl3 valve closed
11/18/2010	8:04:42 PM	PH3 valve closed
11/18/2010	8:04:42 PM	SiCl4 pre valve closed
11/18/2010	8:04:42 PM	SiCl4 post valve closed
11/18/2010	8:04:42 PM	Bypass valve closed
11/18/2010	8:04:42 PM	Main Vac valve closed
11/18/2010	8:04:42 PM	Bubbler valve closed
11/18/2010	8:04:42 PM	Helium MFC set to  0.000000
11/18/2010	8:04:42 PM	H2 MFC set to  0.000000
11/18/2010	8:04:42 PM	BCl3 MFC set to  0.000000
11/18/2010	8:04:42 PM	PHl3 MFC set to  0.000000
11/18/2010	8:04:42 PM	SiCl4 MFC set to  0.000000
11/18/2010	8:04:42 PM	Tube furnace set to 0
11/18/2010	8:04:49 PM	Recipe started at 8:04 PM
11/18/2010	8:04:49 PM	Helium valve closed
11/18/2010	8:04:50 PM	BCl3 valve closed
11/18/2010	8:04:50 PM	PH3 valve closed
11/18/2010	8:04:50 PM	SiCl4 pre valve closed
11/18/2010	8:04:50 PM	SiCl4 post valve closed
11/18/2010	8:04:50 PM	Main Vac valve closed
11/18/2010	8:04:50 PM	Bypass valve closed
11/18/2010	8:04:50 PM	Bubbler valve closed
11/18/2010	8:04:50 PM	H2 valve opened
11/18/2010	8:04:50 PM	Helium MFC set to  0.000000
11/18/2010	8:04:50 PM	H2 MFC set to  500.000000
11/18/2010	8:04:50 PM	BCl3 MFC set to  0.000000
11/18/2010	8:04:50 PM	PHl3 MFC set to  0.000000
11/18/2010	8:04:50 PM	SiCl4 MFC set to  0.000000
11/18/2010	8:04:50 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	8:04:50 PM	Tube furnace set to 0
11/18/2010	8:04:51 PM	Helium valve closed
11/18/2010	8:04:51 PM	BCl3 valve closed
11/18/2010	8:04:51 PM	PH3 valve closed
11/18/2010	8:04:51 PM	SiCl4 pre valve closed
11/18/2010	8:04:51 PM	SiCl4 post valve closed
11/18/2010	8:04:51 PM	Main Vac valve closed
11/18/2010	8:04:51 PM	Bypass valve closed
11/18/2010	8:04:51 PM	H2 valve opened
11/18/2010	8:04:51 PM	Bubbler valve opened
11/18/2010	8:04:51 PM	Helium MFC set to  0.000000
11/18/2010	8:04:51 PM	H2 MFC set to  500.000000
11/18/2010	8:04:51 PM	BCl3 MFC set to  0.000000
11/18/2010	8:04:51 PM	PHl3 MFC set to  0.000000
11/18/2010	8:04:51 PM	SiCl4 MFC set to  0.000000
11/18/2010	8:04:51 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	8:04:51 PM	Tube furnace set to 1000
11/18/2010	8:06:53 PM	Helium valve closed
11/18/2010	8:06:53 PM	BCl3 valve closed
11/18/2010	8:06:53 PM	PH3 valve closed
11/18/2010	8:06:53 PM	Main Vac valve closed
11/18/2010	8:06:53 PM	Bypass valve closed
11/18/2010	8:06:53 PM	H2 valve opened
11/18/2010	8:06:53 PM	SiCl4 pre valve opened
11/18/2010	8:06:53 PM	SiCl4 post valve opened
11/18/2010	8:06:53 PM	Bubbler valve opened
11/18/2010	8:06:53 PM	Helium MFC set to  0.000000
11/18/2010	8:06:53 PM	H2 MFC set to  500.000000
11/18/2010	8:06:53 PM	BCl3 MFC set to  0.000000
11/18/2010	8:06:53 PM	PHl3 MFC set to  0.000000
11/18/2010	8:06:53 PM	SiCl4 MFC set to  50.000000
11/18/2010	8:06:53 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	8:06:53 PM	Tube furnace set to 1000
11/18/2010	9:06:53 PM	H2 valve closed
11/18/2010	9:06:53 PM	BCl3 valve closed
11/18/2010	9:06:53 PM	PH3 valve closed
11/18/2010	9:06:53 PM	SiCl4 pre valve closed
11/18/2010	9:06:53 PM	SiCl4 post valve closed
11/18/2010	9:06:53 PM	Main Vac valve closed
11/18/2010	9:06:53 PM	Bypass valve closed
11/18/2010	9:06:53 PM	Helium valve opened
11/18/2010	9:06:53 PM	Bubbler valve opened
11/18/2010	9:06:53 PM	Helium MFC set to  500.000000
11/18/2010	9:06:53 PM	H2 MFC set to  0.000000
11/18/2010	9:06:53 PM	BCl3 MFC set to  0.000000
11/18/2010	9:06:53 PM	PHl3 MFC set to  0.000000
11/18/2010	9:06:53 PM	SiCl4 MFC set to  0.000000
11/18/2010	9:06:53 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	9:06:53 PM	Tube furnace set to 950
11/18/2010	9:11:53 PM	H2 valve closed
11/18/2010	9:11:53 PM	BCl3 valve closed
11/18/2010	9:11:53 PM	PH3 valve closed
11/18/2010	9:11:53 PM	SiCl4 pre valve closed
11/18/2010	9:11:53 PM	SiCl4 post valve closed
11/18/2010	9:11:53 PM	Main Vac valve closed
11/18/2010	9:11:53 PM	Bypass valve closed
11/18/2010	9:11:53 PM	Helium valve opened
11/18/2010	9:11:53 PM	Bubbler valve opened
11/18/2010	9:11:53 PM	Helium MFC set to  500.000000
11/18/2010	9:11:53 PM	H2 MFC set to  0.000000
11/18/2010	9:11:53 PM	BCl3 MFC set to  0.000000
11/18/2010	9:11:53 PM	PHl3 MFC set to  0.000000
11/18/2010	9:11:53 PM	SiCl4 MFC set to  0.000000
11/18/2010	9:11:53 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	9:11:53 PM	Tube furnace set to 900
11/18/2010	9:16:53 PM	H2 valve closed
11/18/2010	9:16:53 PM	BCl3 valve closed
11/18/2010	9:16:53 PM	PH3 valve closed
11/18/2010	9:16:53 PM	SiCl4 pre valve closed
11/18/2010	9:16:53 PM	SiCl4 post valve closed
11/18/2010	9:16:53 PM	Main Vac valve closed
11/18/2010	9:16:53 PM	Bypass valve closed
11/18/2010	9:16:53 PM	Helium valve opened
11/18/2010	9:16:53 PM	Bubbler valve opened
11/18/2010	9:16:53 PM	Helium MFC set to  500.000000
11/18/2010	9:16:53 PM	H2 MFC set to  0.000000
11/18/2010	9:16:53 PM	BCl3 MFC set to  0.000000
11/18/2010	9:16:53 PM	PHl3 MFC set to  0.000000
11/18/2010	9:16:53 PM	SiCl4 MFC set to  0.000000
11/18/2010	9:16:53 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	9:16:54 PM	Tube furnace set to 850
11/18/2010	9:21:54 PM	H2 valve closed
11/18/2010	9:21:54 PM	BCl3 valve closed
11/18/2010	9:21:54 PM	PH3 valve closed
11/18/2010	9:21:54 PM	SiCl4 pre valve closed
11/18/2010	9:21:54 PM	SiCl4 post valve closed
11/18/2010	9:21:54 PM	Main Vac valve closed
11/18/2010	9:21:54 PM	Bypass valve closed
11/18/2010	9:21:54 PM	Helium valve opened
11/18/2010	9:21:54 PM	Bubbler valve opened
11/18/2010	9:21:54 PM	Helium MFC set to  500.000000
11/18/2010	9:21:54 PM	H2 MFC set to  0.000000
11/18/2010	9:21:54 PM	BCl3 MFC set to  0.000000
11/18/2010	9:21:54 PM	PHl3 MFC set to  0.000000
11/18/2010	9:21:54 PM	SiCl4 MFC set to  0.000000
11/18/2010	9:21:54 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	9:21:54 PM	Tube furnace set to 800
11/18/2010	9:26:54 PM	H2 valve closed
11/18/2010	9:26:54 PM	BCl3 valve closed
11/18/2010	9:26:54 PM	PH3 valve closed
11/18/2010	9:26:54 PM	SiCl4 pre valve closed
11/18/2010	9:26:54 PM	SiCl4 post valve closed
11/18/2010	9:26:54 PM	Main Vac valve closed
11/18/2010	9:26:54 PM	Bypass valve closed
11/18/2010	9:26:54 PM	Helium valve opened
11/18/2010	9:26:54 PM	Bubbler valve opened
11/18/2010	9:26:54 PM	Helium MFC set to  500.000000
11/18/2010	9:26:54 PM	H2 MFC set to  0.000000
11/18/2010	9:26:54 PM	BCl3 MFC set to  0.000000
11/18/2010	9:26:54 PM	PHl3 MFC set to  0.000000
11/18/2010	9:26:54 PM	SiCl4 MFC set to  0.000000
11/18/2010	9:26:54 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	9:26:54 PM	Tube furnace set to 750
11/18/2010	9:29:57 PM	Run aborted at 9:29 PM
11/18/2010	9:29:57 PM	Helium valve closed
11/18/2010	9:29:57 PM	H2 valve closed
11/18/2010	9:29:57 PM	BCl3 valve closed
11/18/2010	9:29:57 PM	PH3 valve closed
11/18/2010	9:29:57 PM	SiCl4 pre valve closed
11/18/2010	9:29:57 PM	SiCl4 post valve closed
11/18/2010	9:29:57 PM	Bypass valve closed
11/18/2010	9:29:57 PM	Main Vac valve closed
11/18/2010	9:29:57 PM	Bubbler valve closed
11/18/2010	9:29:57 PM	Helium MFC set to  0.000000
11/18/2010	9:29:57 PM	H2 MFC set to  0.000000
11/18/2010	9:29:57 PM	BCl3 MFC set to  0.000000
11/18/2010	9:29:57 PM	PHl3 MFC set to  0.000000
11/18/2010	9:29:57 PM	SiCl4 MFC set to  0.000000
11/18/2010	9:29:57 PM	Tube furnace set to 0
11/18/2010	9:30:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2010	9:30:32 PM	Recipe started at 9:30 PM
11/18/2010	9:30:32 PM	Helium valve closed
11/18/2010	9:30:32 PM	H2 valve closed
11/18/2010	9:30:32 PM	BCl3 valve closed
11/18/2010	9:30:32 PM	PH3 valve closed
11/18/2010	9:30:32 PM	SiCl4 pre valve closed
11/18/2010	9:30:32 PM	SiCl4 post valve closed
11/18/2010	9:30:32 PM	Main Vac valve closed
11/18/2010	9:30:32 PM	Bubbler valve closed
11/18/2010	9:30:32 PM	Bypass valve opened
11/18/2010	9:30:32 PM	Helium MFC set to  0.000000
11/18/2010	9:30:32 PM	H2 MFC set to  0.000000
11/18/2010	9:30:32 PM	BCl3 MFC set to  0.000000
11/18/2010	9:30:32 PM	PHl3 MFC set to  0.000000
11/18/2010	9:30:32 PM	SiCl4 MFC set to  0.000000
11/18/2010	9:30:32 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	9:30:32 PM	Tube furnace set to 0
11/18/2010	9:31:09 PM	Helium valve closed
11/18/2010	9:31:09 PM	H2 valve closed
11/18/2010	9:31:09 PM	BCl3 valve closed
11/18/2010	9:31:09 PM	PH3 valve closed
11/18/2010	9:31:09 PM	SiCl4 pre valve closed
11/18/2010	9:31:09 PM	SiCl4 post valve closed
11/18/2010	9:31:09 PM	Bubbler valve closed
11/18/2010	9:31:09 PM	Main Vac valve opened
11/18/2010	9:31:09 PM	Bypass valve opened
11/18/2010	9:31:09 PM	Helium MFC set to  0.000000
11/18/2010	9:31:09 PM	H2 MFC set to  0.000000
11/18/2010	9:31:09 PM	BCl3 MFC set to  0.000000
11/18/2010	9:31:09 PM	PHl3 MFC set to  0.000000
11/18/2010	9:31:09 PM	SiCl4 MFC set to  0.000000
11/18/2010	9:31:09 PM	Bypass solenoid MFC set to  0.000000
11/18/2010	9:31:09 PM	Tube furnace set to 0
11/18/2010	9:31:09 PM	Run finished at 9:31 PM
11/18/2010	9:31:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/18/2010	9:31:45 PM	Helium MFC set to  100.000000
11/18/2010	9:31:46 PM	Helium valve opened
11/18/2010	9:31:52 PM	Helium valve closed
11/18/2010	9:32:20 PM	Helium valve opened
11/18/2010	9:32:25 PM	Helium valve closed
11/18/2010	9:32:59 PM	Bypass valve closed
11/18/2010	9:33:00 PM	Main Vac valve closed
11/18/2010	9:33:17 PM	Bypass valve opened
11/18/2010	9:33:17 PM	Main Vac valve opened
